Largest FoV, longest Z range, most XY measurable area
Optical profilometers for a wide range of metrology tasks—from microscope-based systems for microstructures to macro and bench-top optical profilers for large-area form and quality inspection.
- True Stitch extends measurement field to ~230 × 220 mm while achieving the highest accuracy
- Outstanding measurement precision reveals surface details down to 0.01 nm Z-resolution.
- SST (Smart Scan Technology) makes any surface measurable.
- Easy operation and automation-ready features & interfaces.
- Modular concept enables custom configurations and upgrades, expanding your capabilities.
- Long-term reliability due to rugged design and a 4-year warranty.
Feasibility study?
Send us your sample. We’ll run a feasibility study and review the results with you—so you gain a precise understanding of performance on your actual parts.
Micro.View+
Highest repeatability and reproducibility in sub-nm resolved inspection of texture, roughness, finish and structural details with automated workflows.
Micro.View
Our easy to use, table-top optical profiler. Texture, roughness and microstructure analysis as an affordable yet modular package.
Metro.Lab
Complete and compact test bench for large area form characterization - even with a smaller budget! For QA labs and case-by-case quality inspections in manufacturing.
Pro.Surf+
Multi-sensor profiler for fast large area topography scanning, repeatable measurements and combined form & roughness characterization resolved in the nm range.
Pro.Surf
For fast, large-area topography, form and flatness measurement. Telecentric optics with large Z range reaches holes, largest FoV and true stitching accuracy allow efficient multi-sample measurements.
The portfolio—from macro to micro topography
Micro Profiler
Micro.View profiler systems are optimized for measurements with sub-nanometer resolution. With focused optics and high vertical resolution they enable detailed analysis of microstructures, surface finish and material distribution where even the smallest deviations matter.
Macro Profiler
Pro.Surf with its areal topography scanning determines form and flatness faster. Its telecentric optics with large Z range reaches holes and recessed surfaces. The largest FoV and True Stitching handles big samples and multi-sample measurements with ease. Upgrade to Pro.Surf+ and also analyze roughness all-in-one.
Metro.Lab
Metro.Lab is a compact, wide-area surface profiler. It combines high measurement performance with a small footprint—ideal for space or budget conscious applications that still require reliable 3D surface data.
Choose the right surface profiler with confidence—benefit from our "try before buy" approach.
Surface measurement tasks
Surface roughness measurement
Surface texture analysis in 3D. From Sa/Sq to Str/Sal for validating specifications and surface features.
Maintain form and position tolerances
Verify form and position tolerances such as waviness, flatness, parallelism and tilt. Optical 3D surface metrology delivers reliable results—even in bores.
Flatness, thickness and parallelism
Flatness, thickness and parallelism (FTP) measurement combines top & bottom topography measurement in a single shot.
Coatings and layer thickness
Coating quality control in 3D. Assessing pre-coat texture, post-coat defects, and film thickness.
Tribology analysis
Tribology analysis with 3D surface profiler. Inspecting friction, wear and lubrication performance.
Pass/fail analysis
WLIs deliver fast, objective and easy-to-use pass/fail feedback from areal 3D data. Sub-nanometer Z resolution and recipe-driven workflows support inline SPC.
Surface metrology on microstructures
Topography & dynamics of microstructures and for nanotech. 3D geometry, roughness, and time-resolved motion.
Differences between micro & macro optical profilers
| Profiler type | Field of view | Strengths | Measurement tasks | Best suited for |
| Micro Profiler | From 0.07 up to 3.7 mm | Highest lateral resolution, sub-nm vertical accuracy. | Surface texture, roughness analysis, focused tribology | MEMS, micro-optics, microfluidics, precision parts. |
| Macro Profiler | Single FoV 44 × 33 mm, with True Stitching up to 230 × 220 mm and more | Large-area form measurement, telecentric optics, stable geometry. | Flatness, parallelism, step height, thickness, form measurement deviation. Roughness with Pro.Surf+ | Quality inspection in precision manufacturing, small to large parts and trays. |
| Bench Profiler | 37 × 28 mm | Compact, cost-effective wide-area metrology. | Form deviation, step height, case-by-case quality inspection. | Sample inspection in manufacturing. |
3D optical profilometers in depth
Below you’ll find descriptions of each CSI optical profilometer type to help you compare capabilities and select the right system for your measurement task. In case you are not sure what fits best to your metrology strategy, use the contact form at the end to talk to our experts.
TopMap micro profiler
Microscopic, high-resolution 3D optical profiler for surface topography measurement with high lateral resolution—best for analysis of microstructures, precision components and optics, MEMS, and high precision tribology.
- Variable FoV with spot sizes from 0.07 to 3.7 mm.
- Ideal for sub-nm resolution.
- True Stitching enables highest precision on wider areas.
Choose Micro.View white-light interferometers when maximum lateral resolution and high repeatability is key for your microstructure analysis and ultra-precision machined surfaces.
Macro profiler—Pro.Surf and Metro.Lab
Super efficient macro surface profilometer best for large-area surface form measurement and trays. Pro.Surf is the preferred profiler in manufacturing due to the reliability, efficiency and flexibility.
- Captures up to 2M data points within just seconds
- Outstanding single FoV up to 44 × 33 mm—expandable to 230 × 220 mm with True Stitching.
- Measures flatness, shape, parallelism faster—even inside bores.
- Pro.Surf+ adds a chromatic confocal sensor for combined 2D roughness examination.
- Ideal for precision mechanics, sealing surfaces, watchmaking, and optics
Choose Pro.Surf when you need large-area, high-throughput form deviation measurement with maximum stability.
Turn profilometer operation into standardized, repeatable workflows.
Get the most from your 3D optical profiler: accelerate quick quality checks, support in-depth research, and enable your team to measure with confidence.
- Intuitive 2D & 3D visualization
- Recipe-based workflows (SOPs)
- Full automation readiness (MES/PLC)
- Advanced analysis tools
- Export formats for metrology & QA systems
Operate your metrology task—easy, precise, repeatable
Here are some surface measurement examples—from roughness, tribology measurement to analyzing microstructures.
Discuss your demands with our experts
Let’s start with a short discussion about your parts, tolerances, and workflow—and, if useful, we can add a feasibility study, PolyMeasure (contract measurements), or a PolyRent trial as optional next steps.
