Designed for fast form and flatness inspection on large area components
The Pro.Surf is a macro (large-area) optical profiler with telecenctric optics, optimized for form and flatness inspection over wide fields of view — where microscopic systems reach their limits. It supports fast, non-contact inspection of:
- flatness & form
- trays & batch parts
- bores & recesses
- in production & QC environments
Its large single-shot field of view, 70 mm vertical measuring range, and True Stitching capability enable efficient and accurate flatness, shape, and step-height measurements with minimal setup effort.
Need form and roughness in one station? Take a look at our Pro.Surf+.
Surface profiler for areal flatness and form with high measurement speed and repeatability
Measure large areas faster
With a 44 × 33 mm large single Field of View (FoV) Pro.Surf captures up to 2M measurement points in a single shot. True Stitching extends the XY coverage to ~230 × 220 mm, handling even large samples.
Ideal for fast flatness and step-height measurements on large samples, whether batch, tray or multi-sample measurements like on precision engineered parts, sealing surfaces and complex components.
Measure deep holes and large steps
The telecentric optics in combination with its 70 mm large z measuring range allows Pro.Surf to measure inside of deep holes or recessed areas while keeping a safe distance to samples without risk of collision.
This is a game-changer for higher samples requiring to measure large steps like in bore holes, injector valves where other metrology solutions struggle.
Accuracy you need with a reproducibility you can trust
Large vertical scan range of 70 mm with a <1.45 nm vertical resolution, at <0.5 nm low measurement noise grant highest repeatability in measuring surface form parameters.
The patended ECT Environmental Compensation Technology avoids false rejects in typical production environments by compensating machine vibrations and influences at the machine shop.
The Pro.Surf provides surface measurement data with utmost reliability and reproducibility - tailored to manufacturing and quality control.
Take both: high throughput and traceability
TopMap provides measurement recipes for routine measurements. Load predefined settings with an integrated carcode scanner and automatically recognizes sample patterns without need for any mechanical fixture on the large FoV. Use ISO compliant and reproducible measurements as one-click solutions.
Evaluations are compliant to DIN/ISO standards (e.g., ISO 25178, ISO 4287/4288), quickly visualizing results according to your set tolerances for clear pass-fail analysis. Generate and share reports quickly, or exported to QS-STAT™ for SPC—for increased efficiency, repeatability, and traceability in lab and production.
Choose the right surface profiler with confidence—benefit from our "try before buy" approach.
Large field-of-view measurement examples
Below or some real-life results from standard tasks across common engineering materials. Those examples are gathered by our application centers, which do feasibility studies and offer contractual measurement services.
Choose the right surface profiler with confidence—get a demonstration of our capabilities.
Embedded features support high precision and efficient workflows - even in rough environment
Get a wide FoV up to 44 × 33 mm (extendable to ~230 × 220 mm via stitching), automation-ready operation with motorized stages, recipe control and barcode start, plus telecentric WLI/CSI and a 70 mm Z-range for nanometer-level vertical performance.
WLI with telecentric optical design
→ Keeps geometry accurate across height and dept
Traceably calibrated WLI/CSI delivers non-contact, areal 3D data with nanometer vertical resolution. The telecentric optical approach keeps the beams / rays parallel to the optical axis, preserving constant magnification and uniform illumination over height—even enabling measurements in holes.
- Non-contact, repeatable, fast areal scans
- Phase/envelope evaluation for smooth and rough surfaces
- Smart surface/adaptive scanning for varying reflectivities
- Long-life 525 nm LED
True Stitching - Higher accuracy for wider samples
→ True Stitching provides unmatched precision when scanning wide-area samples
Because larger surfaces exceed the single-shot field of view — stitching merges tiles into one accurate dataset. The metrology quality of such large-area measurements depends on the optics and sensing technology, the number of tiles and the stitching algorithms.
True Stitching delivers high-fidelity large-area measurements by minimizing stitching artifacts and preserving geometry.
An independent benchmarking at a leading German technical university compared six optical profilers from different manufacturers and the Polytec profilometer demonstrated the highest stitching and measurement quality. This is achieved through several key features:
- Large single-shot FoV → fewer tiles and seams, less cumulative error
- Sophisticated stitching algorithms → controlled overlap, robust registration, and metrology-safe blending that preserves steps and edges
- For Pro.Surf: Telecentric/CSI optics with correlogram evaluation → stable geometry and height fidelity across tiles
The result is high-fidelity, large-area topography with fewer artifacts and audit-ready residuals—what we call True Stitching.
Large field-of-view (FoV) optics
→ Reduces stitching and cycle time
Pro.Surf offers a wide single-shot field of view up to 44.9 × 33.8 mm (with ~1.91 million points), so broader samples or multiple parts can be measured in a single acquisition. With the built-in stitching function, coverage extends up to ~228 × 221 mm.
- Measure multiple samples at once; automatic sample recognition available
- Short cycle times; reduced stitching effort
ECT – environmental compensation technology
→ Stabilizes results in real shopfloor environments
Noise, vibration, and temperature fluctuations can affect measurements. ECT compensates for such disturbances and ensures consistent data — even on the shop floor.
- Improves reliability in noisy or unstable environments
- Enables automation and inline QC without full isolation
- Especially helpful for sensitive components (e.g., MEMS, thin films)
Ready for automated metrology workflows
→ Enables unattended, repeatable measurements
The modular design and motorization options makes it easy to automate and integrate the Pro.Surf profilometer into existing process and machines. A bundle of features and capabilities enables highly efficient and unattended metrology workflows:
- Pattern matching and Smart Scanning Technologies
- Motorized X, Y, Z, tip/tilt stages
- Large FoV and automated stitching for high-resolution scans over large areas
- Recipe system in TMS (Software) for operator-independent workflows
- Rugged design without moving parts and ECT (environmental compensation technology)
Pattern matching
Machine-vision routine that finds and registers parts against a template so recipes hit the right locations (even if parts are shifted or rotated). Ideal for trays and multi-sample runs; pairs well with automatic sample recognition to reduce fixturing.
Smart Scanning Technology
Acquisition mode that adapts to varying reflectivity/contrast so you can measure “almost any surface” reliably in one setup; included in the TopMap software.
Telecentric optic
Enabling parallel rays to the optical axis for constant magnification —enabling measurements near edges and into bores.
Automation with recipes
Sample recognition and pattern matching for tray scans; barcode start with automatic sample/recipe ID logging
Large Field of View (FoV)
Single-shot FoV up to 44.9 × 33.8 mm (1.91 Mpts). Built-in stitching extends coverage to ~228 × 221 mm for trays and larger components.
Big sample volume
Positioning volume up to 200 × 200 × 70 mm. Motorized XY and tip/tilt options
Modular setup, specification and options
| Narrow Focus | Large Focus | |
| Positioning Volume | 200 x 200 x 70 mm³ = 0.028 m | |
| Max. number of points in single measurement | X: 1592, Y: 1200, | |
| Vertical range | 70 mm | |
| Measuring area | X: 22.8 mm Y: 17.2 mm X·Y: 392.2 mm² | X: 44.9 mm Y: 33.8 mm X·Y: 1517.6 mm² |
| Measurement point spacing | X: 14.3 µm Y: 14.3 µm | X: 28.2 µm Y: 28.2 µm |
| Calc. lateral optical resolution | 8.4 µm | 16 µm |
| Measurement noise | < 0.5 nm (phase evaluation, smooth surfaces) | |
| Vertical resolution | < 1.45 nm (phase evaluation, smooth surfaces) | |
| Roughness measuring range | ( only in Pro.Surf+ ) | |
| Roughness lateral resolution | ( only in Pro.Surf+ ) | |
| Typical roughness measurement | ( only in Pro.Surf+ ) | |
Please take a look at the datasheet for specifics and more details (see "Download" section below)
Feasibility check?
Send us your sample and we run a feasibility study with our profiler and walk with your through the results.
This gives you a precise understanding of the optical profiler’s performance on your actual samples.
Related information and downloads
Flatness, thickness and parallelism
Flatness, thickness and parallelism (FTP) measurement combines top & bottom topography measurement in a single shot.
Pass/fail analysis
WLIs deliver fast, objective and easy-to-use pass/fail feedback from areal 3D data. Sub-nanometer Z and recipe-driven workflows support inline SPC.
"Try before buy" offer
Measure, rent, decide - on your terms. Make a confident decision about which surface profiler fits into your metrology strategy and safeguard your capital investment.
Downloads
Discuss your demands with our experts
Let’s start with a short discussion about your parts, tolerances, and workflow — and, if useful, we can add a feasibility study, PolyMeasure (contract measurements), or a PolyRent trial as optional next steps.
