Dive into specific measurement tasks for surface inspection
Functional and process requirements are expressed through standardized surface parameters that quantify topography and texture. The following collection details each parameter, recommended practices for evaluation, and compatible measurement systems.
Surface roughness measurement
Surface texture analysis in 3D. From Sa/Sq to Str/Sal for validating specifications and surface features.
Maintain form and position tolerances
Verify form and position tolerances such as waviness, flatness, parallelism and tilt. Optical 3D surface metrology delivers reliable results—even in bores.
Flatness, thickness and parallelism
Flatness, thickness and parallelism (FTP) measurement combines top & bottom topography measurement in a single shot.
Coatings and layer thickness
Coating quality control in 3D. Assessing pre-coat texture, post-coat defects, and film thickness.
Tribology analysis
Tribology analysis with 3D surface profiler. Inspecting friction, wear and lubrication performance.
Pass/fail analysis
WLIs deliver fast, objective and easy-to-use pass/fail feedback from areal 3D data. Sub-nanometer Z resolution and recipe-driven workflows support inline SPC.
Surface metrology on microstructures
Topography & dynamics of microstructures and for nanotech. 3D geometry, roughness, and time-resolved motion.