Automation-ready profilometer with color imaging
Micro.View+ extends surface roughness inspection into automated, operator-independent workflows for production and quality control. This profilometer combines sub-nanometer precision, a large 100 mm Z-range, and full motorization to deliver fast, repeatable surface measurements — from micro-features to larger components.
- Reliable surface roughness analysis in sub-nm precision on various materials thanks to Smart Scanning Technology
- Widest and most variable FoV for flexible roughness analysis (from 0,07 mm bis zu 15,5 x 11,7 mm)
- True Stitching for unmatched accuracy of wider parts
- Wide Z measurement range of 100mm with full resolution due to Continuous Scanning Technology (CST)
- Recipe-driven measurement with Focus Finder for repetitive operations
- Compliant to newest standards (ISO 21920 and more)
- Operator-independent workflows with motorized X/Y/Z, tip/tilt, encoded turret and Focus Tracker
- Ready for full-automation by tight integration with modular design and interfaces
Micro.View+ is best for applications with increased requirements for automation, serial measurements, or operator-independent workflows. In case automation capabilities and color imaging are not demanded, the Micro.View profiler could be another attractive alternative.
Easy profiling of nearly any surface and ready for automated workflows in production or the lab
Measure where others struggle
Many optical profilers struggle with highly reflective, dark, low-contrast, or transparent materials. Micro.View overcomes this using embedded correlogram technology, which allows multiple scans at different light intensities. This enables reliable measurements even on complex materials.
The result: precise 3D data for topography, roughness, microstructures, step heights, and flatness — even on the most challenging surfaces. A key reason customers switch to Polytec is our ability to measure mirror-like or polished surfaces where other systems fail.
Precision by experience
With decades of experience, our engineers combined phase and envelope evaluation of the correlogram with inherently low system noise and our optional Environmental Compensation Technology (ECT). This results in sub-nanometer vertical resolution and outstanding 3D data clarity.
And with our True Stitching, using advanced algorithms (AI), our systems and software deliver an unmatched precision with wider samples.
This level of precision empowers engineers to verify tight tolerances, optimize production, and ensure long-term reliability.
Utilizing the full Z-range
With Continuous Scanning Technology (CST), Micro.View uses the entire 100 mm travel range as usable Z-range — independent of the selected objective. This ensures stable resolution across tall parts and eliminates the need for repositioning.
Different stand options further support larger or taller samples, enabling flexible setup from small research parts to large industrial components.
Easy to measure, solid in documentation.
Micro.View systems are designed for ease of use. Focus Finder and QC recipe tools simplify setup, while CST and ECT ensure stable data without constant adjustment.
Micro.View+ combines high-resolution 3D topography with color imaging for intuitive visualization of defects or wear. Built-in reporting tools support traceable documentation to make it as easy as possible for your engineering, production, and quality teams.
Platform for reliable automation
Modular Micro.View+ line provides the platform with full motorization (X, Y, Z, tip/tilt), Focus Tracker, and a motorized turret for unattended operation. With QC recipe management, different sample types can be measured with operator-independent quality control and minimal manual effort.
Combined with ECT and built-in vibration isolation, Micro.View+ enables lab-grade precision directly in production lines — with higher throughput and lower operator influence.
Choose the right surface profiler with confidence—benefit from our "try before buy" approach.
Automated surface measurement: From roughness to tribology with high repeatability
Below or some real-life results from standard tasks (roughness, flatness, step height, texture, tribology) across common engineering materials. Those examples are gathered by our application centers which does feasibility studies and offers contractual measurement services.
Choose the right surface profiler with confidence—get a demonstration of our capabilities.
The 3D profilometer for highest precision with automation capabilities and color imaging
Micro.View+ offers a wide ability for workflow automation and is highly effective for repetitive metrology jobs. Especially with the optional motorized turret and stages - also with tip/tilt feature. Some key features:
True Stitching - Higher accuracy for wider samples
Because larger surfaces exceed the single-shot field of view — stitching merges tiles into one accurate dataset. The metrology quality of such large-area measurements depends on the optics and sensing technology, the number of tiles and the stitching algorithms.
True Stitching delivers high-fidelity large-area measurements by minimizing stitching artifacts and preserving geometry.
An independent benchmarking at a leading German technical university compared six optical profilers from different manufacturers and the Polytec profilometer demonstrated the highest stitching and measurement quality. This is achieved by various features as:
- Large single-shot FoV → fewer tiles and seams, less cumulative error
- Sophisticated stitching algorithms → controlled overlap, robust registration, and metrology-safe blending that preserves steps and edges
The result is high-fidelity, large-area topography with fewer artifacts and audit-ready residuals—what we call True Stitching.
Sub-nm surface roughness inspection with large FoV
Widest Field of View - up to 15.5 x 11.7 mm
The new and unique 0.6x lens literally expands your view: Micro.View allows the analysis of high-resolution surface roughness, texture or microstructures using classic 20x to 111x. A single click with automatic lens switch to 0.6x allows for a seamless transition to large-area form or flatness measurements. Examine microstructures on large scale without stitching. Reveal all structural details while keeping an eye on form parameters, warpage or large area steps.
CSI – coherence scanning interferometry for highest precision.
Micro.View is based on CSI (also called white-light interferometry), the industry standard for non-contact, areal surface metrology. It scans a broadband light source vertically and analyzes the interference pattern.
- Envelope evaluation: robust on rough and low-contrast surfaces
- Phase evaluation: sub-nanometer resolution on smooth, flat samples
- Correlogram analysis: full use of the interference pattern for maximum robustness and accuracy
This allows measurement of both polished optics and rough technical parts with the same system.
CST – full 100 mm Z-range without sacrificing resolution.
Continuous Scanning Technology (CST) transforms the entire 100 mm travel range into usable Z-range with consistent resolution — independent of lens.
- Supports large and tall samples without repositioning
- Maintains accuracy throughout the measurement range
- Reduces setup effort and avoids stitching or refocusing
ECT – stable 3D surface data on the shop floor.
Noise, vibration, and temperature fluctuations can affect measurements. Our Environmental Compensation Technology (ECT) compensates for such disturbances and ensures consistent data — even on the shop floor.
- Improves reliability in noisy or unstable environments
- Enables automation and inline QC without full isolation
- Especially helpful for sensitive components (e.g., MEMS, thin films)
Focus Finder & Focus Tracker - Every measurement in focus, always.
Accurate focus is critical for surface metrology.
- Focus Finder (standard): automatically detects optimal focus point to reduce setup time
- Focus Tracker (Micro.View+): keeps the surface in focus during movement — ideal for stitching and automation
This ensures stable focus across all measurements, even on uneven or moving surfaces.
Motorization & automation - for shopfloor efficiency.
Micro.View+ adds full motorization for maximum flexibility and repeatability. Ideal for production environments or recurring measurement tasks.
- Motorized turret for up to five encoded objectives
- Motorized X, Y, Z, tip/tilt stages
- Automated stitching for high-resolution scans over large areas
- QC recipe system for operator-independent workflows
Color imaging (1.9 or 5 MP camera) for a better understanding of the surface features
Micro.View+ integrates a 5 MP color camera to enhance 3D measurements with visual detail.
- Easier identification of defects or wear
- Supports documentation and reporting
- Complies with ISO 25178 for traceable results
ECT and CST
Environment Compensation and Continues Scanning Technology to support easy and unattended measurements
Smart Scanning Technology
SST supports measurement of reflective or matte surfaces
Versatile stages
Motorized 100 x 100 or 200 x 200 mm stage. Manual or motorized tip/tilt feature.
Focus Tracker
Manages focus when using tip/tilt stages to ensure optimized resolution and repeatability.
Encoded turret
Motorized or manual turret with Focus Finder & Focus Tracker.
100mm Z-Range (and more)
100mm z-range (equals measurement range) with Continous Scanning Technology (CST).
Height can be extended with different stands.
Color imaging
1.9 MP camera (5MP optional) provides colored images of samples and broader insights/features.
Choose the right surface profiler with confidence—let us run a feasibility study with your sample.
Modular setup, specification and options
| Z Range | 100 mm (positioning & measurement) |
| Vertical resolution | 0.01 nm |
| Repeatability of RMS | 0.05 nm |
| Sample reflectivity | 0.05 to 100 % |
| Measuring points X-Y pixels | 1.352.000 (effective pixels) 1.352 x 1000 |
| Measuring speed | 100 µm/s |
| Stitching | Up to 500 million data points |
| ISO parameters | ISO 25178, ASME B46.1, ISO 4287, ISO 13565, ISO 21920 |
Micro.View+
Micro.View+C (compact)
Feasibility check?
Send us your sample and we run a feasibility study with our profiler and walk with your through the results.
This gives you a precise understanding of the optical profiler’s performance on your actual samples.
Relevant stories
Micro.View and Pro.Surf measure roughness - so what is the difference?
While Micro.View also supports form, flatness and step height measurements, its core strength lies in high-resolution 3D surface roughness and texture analysis.
The Pro.Surf+ has the reverse approach. Strength is flatness, parallelism and form inspection but also can run surface roughness analysis with a lateral resolution of 2.6 µm.
White light interferometer
Introduction of the white light interferometry technology and the benefits for non-contact areal surface measurement.
ISO 21920 roughness
ISO 21920 is the new standard for mechanical engineering, design and roughness specifications
Measurement tasks
With a WLI optical profiler you can handle all the surface measurement tasks - from surface form parameters, roughness and specific tasks as thickness of layers and coatings.
Downloads
Discuss your demands with our experts
Let’s start with a short discussion about your parts, tolerances, and workflow — and, if useful, we can add a feasibility study, PolyMeasure (contract measurements), or a PolyRent trial as optional next steps.
