Microstructure testing

Active micro-electromechanical components—such as MEMS actuators and sensors—require advanced measurement technology because electrical testing alone cannot fully reveal their mechanical behavior. Polytec’s MSA Micro System Analyzers provide comprehensive characterization of microsystems by combining high-resolution surface topography with precise measurement of dynamic motion.

Using laser Doppler vibrometry, MSA systems capture micro-scale vibrations and resonances across a broad frequency range up to the GHz level. Engineers can visualize full-field mode shapes with exceptional displacement resolution and true phase information—ideal for design validation, performance optimization, and failure analysis.

With patented IRIS technology, Polytec systems can even measure MEMS dynamics through intact silicon encapsulation, allowing engineers to test devices in their final packaged state without modification. This enables faster development cycles, deeper insight into device behavior, and greater confidence in MEMS performance.

Ensure the performance and reliability of MEMS and microstructures with fast, non-contact surface metrology. Because microscopic structures are extremely sensitive, traditional contact measurement methods can alter or damage the sample. Polytec’s optical measurement solutions enable non-destructive surface characterization, allowing engineers to accurately evaluate form, roughness, and structural features without influencing the device.

Polytec TopMap 3D optical profilometers capture millions of height data points across the entire surface in just seconds using coherence scanning interferometry. This enables precise topography measurements on a wide range of materials—from rough CNC-machined surfaces to smooth, highly reflective wafers. Intelligent scanning technology automatically handles varying reflectivity, delivering reliable, repeatable measurements with minimal setup time.

Engineers rely on TopMap systems to quickly analyze microsensors, actuators, sealing surfaces, structured metal sheets, machined components, and biomedical samples. The result is faster development cycles, improved product quality, and greater confidence in microstructure performance.