3D vibration measurement for MEMS and microsystems
Real objects’ vibrations are usually three-dimensional. While you can indeed show preferential directions, production tolerances and other influences lead to movement components in other spatial directions too. You can use the MSA-100-3D Micro System Analyzer to analyze your sample’s dynamic behaviour in an integrated way, over a wide bandwidth and in real time. The vibration components in all three spatial directions are recorded simultaneously in high resolution and are analyzed as an integrated data record. You achieve the sub-picometer amplitude resolution typical of laser vibrometers regardless of the direction of vibration.
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Highlights
//- Vibration measurement in real time with a high bandwidth of up to 25 MHz
- Sub-picometer amplitude resolution for both out-of-plane and in-plane movements
- Both single point and full-field measurements
- Small laser spot of less than 4 μm enables maximum lateral resolution
- Large stand-off distances of 38 mm
- Compatible with common MEMS probe stations
Because real life happens in 3D
Together with the high lateral resolution caused by a microscopic laser spot and the frequency bandwidth of up to 25 MHz, the Polytec MSA-100-3D is the ideal measuring device for characterizing microelectromechanical sensors and actuators (MEMS), other microstructures and biological samples.
For full-field characterization the MSA-100-3D analyzes samples over the entire surface by having the software scan the sample and then graphically represent the deflection shapes.
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