非接触式测量声表面波（SAW）
声表面波（SAW）滤波器是通过表面声波运作的电子器件，实际上是机械滤波器。其性能优越，可集成至高频应用中（如移动电话）。优化 SAW 表面微声学特性是研发 SAW 新部件的关键任务之一。
由于频率高、声路径短、振幅小，声表面波的测量和可视化对测量技术要求非常高，激光测振仪是可用于该系统上为数不多的可用解决方案之一。
Polytec 激光多普勒测振仪，采用非接触式测量方法，几乎涵盖所有频率，快速输出的振型令人印象深刻，甚至可确定瞬态和弛豫特性。主要结果还可用于确定如滤波特性和性能损失（泄漏）等特性。
Polytec Magazine
Selective polarization conversion of surface acoustic waves
A new driving mechanism for acoustofluidics
实际示例：
除用作电子滤波器外，SAWs 在微流体应用中也起到关键作用。在这方面，SAW 用于生物材料的定向液滴控制。Polytec 公司的超高频激光测振仪UHF-120，具有非接触式光学测量、频带宽和高分辨率等技术优势，当开发这种芯片实验室部件时，可使用其来确定部件的表面动态特性。
Microstructure characterization
相关产品
MSA-600显微式激光测振仪
MSA-600显微式激光测振仪专用于测量MEMS和显微结构，是获取三维静态特性与动态特性的一体化光学测量解决方案，其有助于加快产品开发进程，优化产品质量控制，甚至可集成至商用探针台上进行晶圆级测试。现在高达 6 GHz。
MSA-100-3D显微式激光测振仪
3D显微式激光测振仪同时记录XYZ三个方向的振动分量，测试带宽覆盖DC~25 MHz，每向的振幅分辨率均达到亚皮米级，可用于面内和面外振动测试。
更多应用
- 晶片级
![Deflection shape after modal testing microacoustic device on wafer level]( "Deflection shape after modal testing microacoustic device on wafer level")
Deflection shape after modal testing microacoustic device on wafer level - MEMS样机试验
![MEMS prototype testing, here a CMOS / MEMS co-integrated flow microsensor, (C) University of Louvain, Belgium]( "MEMS prototype testing, here a CMOS / MEMS co-integrated flow microsensor, (C) University of Louvain, Belgium")
MEMS prototype testing, here a CMOS / MEMS co-integrated flow microsensor, (C) University of Louvain, Belgium - cMUTs and pMUTs
![Laser Doppler vibrometer measurements of several leaking CMUT cells visualizing dynamic displacement]( "Laser Doppler vibrometer measurement of leaking CMUT transducer cells")
Laser Doppler vibrometer measurements of several leaking CMUT cells, visible with a much lower dynamic displacement when operating the device - FEM 验证
![Eigen frequency of RF-MEMS switch for FEM simulation validation, G. Schrag University of Munich]( "Eigen frequency of RF-MEMS switch for FEM simulation validation, G. Schrag University of Munich")
Determination of Eigen frequency as one phase in the parameter extraction and calibration procedure of an energy-coupled simulation model of an RF-MEMS switch, G. Schrag University of Munich - 细观
![Laser vibration measurement for testing micro-mechanical MEMS]( "Laser vibration measurement for testing micro-mechanical MEMS")
Laser vibration measurement for testing micro-mechanical MEMS - 可靠性
![Vibration measurements for reliability testing on MEMS in a vacuum chamber]( "Vibration measurements for reliability testing on MEMS in a vacuum chamber")
Vibration measurements for reliability testing on MEMS in a vacuum chamber - 生物 MEMS
![Deflection shape of cMUT transducer array, University of Alberta]( "Deflection shape of cMUT transducer array, University of Alberta")
Deflection shape of cMUT transducer array, University of Alberta
