测量MEMS系统的3D动态特性及形貌特性

表面形貌、动态特性分析及可视化是显微结构(如MEMS器件)进行测试和开发的关键。这对于验证有限元算法、确定串扰影响和测量表面形变等都至关重要。

亮点

  • 专用于显微结构的一体化光学测量工作站
  • 真正的实时测量(无需数据后处理)
  • 亚pm级的位移分辨率
  • 快速测量,振型可视化
  • 操作简便、直观
  • 自动化测试系统,易于集成至探针台
  • Import / export options for FE model validation

基于MEMS系统的一体化光学测量解决方案

基于MEMS系统的MSA-600显微式激光测振仪,集多种测量功能于一体,其不仅能测量面内振动和面外振动,还能测量表面形貌。系统具有极高的灵活性和精度,以满足显微结构未来的发展需要。显微式激光测振仪可提供精确的三维动态和静态响应数据,在降低开发和制造成本的同时提高产品性能,从而缩短设计周期,简化故障处理,提高产品产量。

高性能激光多普勒测振仪能快速进行实时测量,位移分辨率达亚pm级。白光干涉仪可以在几秒钟内提供数以百万计的三维表面形貌数据。MSA-600的用户界面直观,操作简便,是一款用于研究、开发和质量控制的功能强大的光学测量系统。系统易于集成至常见的商用探针台上,从MEMS原型设计到测试和故障排除,其能在各个开发阶段给您提供帮助,从而降低生产成本并缩短产品上市时间。

Wafer-level and single-die testing

配件和组件

Optical accessories

A-MOB-xxxx Bright Field Objectives

For out-of-plane and in-plane vibration measurement. Available magnifications: 1x, 2x, 5x, 10x, 20x, 50x, 100x and 3.6x, 10x for large working distances.

Tripods, test stands, positioning stages

A-STD-TST-01 Test Stand

Test stand providing ample workspace. With motorized z-axis, travel range 200 mm.

A-STD-BAS-02 Base Stand

Rigid support for the sensor head. Includes manual focus block with 100 mm travel range with coarse and fine drive. Interfaces to commercially available optical tables.

A-STD-F50 Focus Block

Travel Range 50 mm. With coarse and fine drive for manual z-axis adjustment of the sensor head. Interfaces with commercially available wafer probe stations.

Vibration isolation, breadboards

A-TAB-AIR-01 Active Vibration Isolation Table

Air-damped vibration isolation table with active level adjustment. Compatibility: A-STD-TST-01 Test Stand, A-STD-BAS-02 Base Stand.

A-TAB-ELC-01 Active Vibration Isolation Table

Electronically controlled voice coil stabilization for highest isolation performance. Compatibility: A-STD-TST-01 Test Stand, A-STD-BAS-02 Base Stand.

A-WST-001 Workstation

Workstation for use with Polytec's A-TAB-AIR-01 and A-TAB-ELC-01 Active Vibration Isolation Tables.

A-BBO-ME02 Breadboard

Breadboard with metric hole pattern. Footprint 900 mm x 600 mm. Compatibility: A-STD-BAS-02 Base Stand.

A-AVI-MELA Active Vibration Isolation Breadboard

Electronically controlled for highest vibration isolation performance. With metric hole pattern. Footprint 600 x 800 mm. Compatibility: A-STD-BAS-02 Base Stand.

Miscellaneous

A-ESG-001 External Signal Generator

For high frequency, broadband sample excitation.

MSA-A-WPM Wafer Prober Module

Together with the A-PST-200P XY Positioning Stage, the wafer prober module forms a motorized platform for electrical contacting and high-precision measurement of wafers and substrates up to 200 mm in diameter.


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