测量MEMS系统的3D动态特性及形貌特性
表面形貌、动态特性分析及可视化是显微结构(如MEMS器件)测试和开发的关键。这对于验证有限元算法、确定串扰影响和测量表面形变等都至关重要。
MSA-600-M/V型的测量带宽高达25MHz,适用于MEMS、MEMS麦克风和其它微系统的振动测试。
全新研发的MSA-600-X/U型的测量带宽更是高达2.5GHz,尤其适用于高频MEMS谐振器、微声器件如SAW、BAW等振动测试。
全球首发: 全新推出的专业的光学测试工作站MSA-600-S终于和用户见面啦!MSA-600-S可用于结构振动测试和表面形貌测试。MSA-600-S可测试高频设备,如FBAR(薄膜体声谐振器),以及其它GHz谐振器和设备。
亮点
- 专用于显微结构的一体化光学测量工作站
- 真正的实时测量(无需数据后处理)
- MSA-600-M/V 型测试频率高达25 MHz
- MSA-600-X/U 型测试频率高达2.5 GHz
- 新的 MSA-600-S 型测试频率高达6 GHz
- 亚pm级的位移分辨率
- 快速测量,振型可视化
- 操作简便、直观
- 自动化测试系统,易于集成至探针台
- 用于FE模型验证的导入/导出功能(选配)
晶圆级和单模测试
配件和组件
光学配件

A-MOB-xxxx Bright Field Objectives
For out-of-plane and in-plane vibration measurement. Available magnifications: 1x, 2x, 5x, 10x, 20x, 50x, 100x and 3.6x, 10x for large working distances.
三脚架,测试台,定位台

A-STD-TST-01 Test Stand
Test stand providing ample workspace. With motorized z-axis, travel range 200 mm.

A-STD-BAS-02 Base Stand
Rigid support for the sensor head. Includes manual focus block with 100 mm travel range with coarse and fine drive. Interfaces to commercially available optical tables.

A-STD-F50 Focus Block
Travel range 50 mm. With coarse and fine drive for manual z-axis adjustment of the sensor head. Interfaces with commercially available wafer probe stations.
隔震台,面包板

A-TAB-AIR-01 Active Vibration Isolation Table
Air-damped vibration isolation table with active level adjustment. Compatibility: A-STD-TST-01 Test Stand, A-STD-BAS-02 Base Stand.

A-TAB-ELC-01 Active Vibration Isolation Table
Electronically controlled voice coil stabilization for highest isolation performance. Compatibility: A-STD-TST-01 Test Stand, A-STD-BAS-02 Base Stand.

A-BBO-ME02 Breadboard
Breadboard with metric hole pattern. Footprint 900 mm x 600 mm. Compatibility: A-STD-BAS-02 Base Stand.

A-AVI-MELA Active Vibration Isolation Breadboard
Electronically controlled for highest vibration isolation performance. With metric hole pattern. Footprint 600 x 800 mm. Compatibility: A-STD-BAS-02 Base Stand.
其它

A-ESG-001 External Signal Generator
For high frequency, broadband sample excitation. Remotely controllable by PSV Software.

A-SPK-0008 Wafer Prober Module
Together with the A-PST-200P XY Positioning Stage, the wafer prober module forms a motorized platform for electrical contacting and high-precision measurement of wafers and substrates up to 200 mm in diameter.

A-SPK-0010 Vacuum Prober Module
Vacuum and purge lines. Micro manipulator for handling of four electrical probes.