测量MEMS系统的3D动态特性及形貌特性

       表面形貌、动态特性分析及可视化是显微结构(如MEMS器件)测试和开发的关键。这对于验证有限元算法、确定串扰影响和测量表面形变等都至关重要。

        MSA-600-M/V型的测量带宽高达25MHz,适用于MEMS、MEMS麦克风和其它微系统的振动测试。

        全新研发的MSA-600-X/U型的测量带宽更是高达2.5GHz,尤其适用于高频MEMS谐振器、微声器件如SAW、BAW等振动测试。

亮点

  • 专用于显微结构的一体化光学测量工作站
  • 真正的实时测量(无需数据后处理)
  • MSA-600-M/V 型测试频率高达25 MHz
  • MSA-600-X/U 型测试频率高达2.5 GHz
  • 亚pm级的位移分辨率
  • 快速测量,振型可视化
  • 操作简便、直观
  • 自动化测试系统,易于集成至探针台
  • 用于FE模型验证的导入/导出功能(选配)

基于MEMS系统的一体化光学测量解决方案

       基于MEMS系统的MSA-600显微式激光测振仪,集多种测量功能于一体,其不仅能测量面内振动和面外振动,还能测量表面形貌。系统具有极高的灵活性和精度,以满足显微结构未来的发展需要。显微式激光测振仪可提供精确的三维动态和静态响应数据,在降低开发和制造成本的同时提高产品性能,从而缩短设计周期,简化故障处理,提高产品产量。

       高性能激光多普勒测振仪能快速进行实时测量,位移分辨率达亚pm级。白光干涉仪可以在几秒钟内提供数以百万计的三维表面形貌数据。MSA-600的用户界面直观,操作简便,是一款用于研究、开发和质量控制的功能强大的光学测量系统。系统易于集成至常见的商用探针台上,从MEMS原型设计到测试和故障排除,其能在各个开发阶段给您提供帮助,从而降低生产成本并缩短产品上市时间。

Wafer-level and single-die testing

配件和组件

Optical accessories

A-MOB-xxxx Bright Field Objectives

For out-of-plane and in-plane vibration measurement. Available magnifications: 1x, 2x, 5x, 10x, 20x, 50x, 100x and 3.6x, 10x for large working distances.

Tripods, test stands, positioning stages

A-STD-TST-01 Test Stand

Test stand providing ample workspace. With motorized z-axis, travel range 200 mm.

A-STD-BAS-02 Base Stand

Rigid support for the sensor head. Includes manual focus block with 100 mm travel range with coarse and fine drive. Interfaces to commercially available optical tables.

Focus block for microscopic observations and measurements of MEMS with a MSA Micro System Analyzer from Polytec
Focus block for microscopic observations and measurements of MEMS with a MSA Micro System Analyzer from Polytec

A-STD-F50 Focus Block

Travel range 50 mm. With coarse and fine drive for manual z-axis adjustment of the sensor head. Interfaces with commercially available wafer probe stations.

Vibration isolation, breadboards

A-TAB-AIR-01 Active Vibration Isolation Table

Air-damped vibration isolation table with active level adjustment. Compatibility: A-STD-TST-01 Test Stand, A-STD-BAS-02 Base Stand.

A-TAB-ELC-01 Active Vibration Isolation Table

Electronically controlled voice coil stabilization for highest isolation performance. Compatibility: A-STD-TST-01 Test Stand, A-STD-BAS-02 Base Stand.

Breadboard for optical testing of MEMS and microstructures with MSA Micro System Analyzers from Polytec
Breadboard for optical testing of MEMS and microstructures with MSA Micro System Analyzers from Polytec

A-BBO-ME02 Breadboard

Breadboard with metric hole pattern. Footprint 900 mm x 600 mm. Compatibility: A-STD-BAS-02 Base Stand.

Breadboard for optical MEMS testing with a MSA Micro System Analyzer from Polytec
Breadboard for optical MEMS testing with a MSA Micro System Analyzer from Polytec

A-AVI-MELA Active Vibration Isolation Breadboard

Electronically controlled for highest vibration isolation performance. With metric hole pattern. Footprint 600 x 800 mm. Compatibility: A-STD-BAS-02 Base Stand.

Miscellaneous

Signal generator for microstructure analysis with Polytec MSA Micro System Analyzers
Signal generator for microstructure analysis with Polytec MSA Micro System Analyzers

A-ESG-001 External Signal Generator

For high frequency, broadband sample excitation. Remotely controllable by PSV Software.

Probe station for wafer level testing of MEMS and microstructures with a Polytec MSA Micro System Analyzer
Probe station for wafer level testing of MEMS and microstructures with a Polytec MSA Micro System Analyzer

A-SPK-0008 Wafer Prober Module

Together with the A-PST-200P XY Positioning Stage, the wafer prober module forms a motorized platform for electrical contacting and high-precision measurement of wafers and substrates up to 200 mm in diameter.

Vaccuum chamber for microstructure analysis with Polytec MSA Micro System Analyzers
Vaccuum chamber for microstructure analysis with Polytec MSA Micro System Analyzers

A-SPK-0010 Vacuum Prober Module

Vacuum and purge lines. Micro manipulator for handling of four electrical probes.


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