MEMS 和微系统的3D 振动测量

实物振动通常是三维振动。诚然,您可选择优先显示某特定方向的振动,但由于存在产品公差和其它影响,其它空间方向也会产生运动分量。 MSA-100-3D 显微系统分析可在大带宽范围内实时测量样本的动态特性,高分辨率同时记录和分析XYZ三个方向的振动分量,每向的振幅分辨率均达到亚皮米级。 

亮点

  • 实时振动测量,高达 25 MHz 的大带宽
  • 用于面外和面内振动测量,振幅分辨率达亚皮米级
  • 单点式和全场扫描式振动测量
  • 激光光斑小于 4光斑,横向分辨率极高
  • 测试距离大,可达38 mm
  • 可与普通 MEMS 探针测试台兼容

因为在3D 真实的生活中运动

因激光光斑极小,所以横向分辨率极高,且带宽高达 25 MHz,Polytec的MSA-100-3D 是用于微机电传感器和致动器 (MEMS) 以及其他微结构的振动测量的理想设备。通过软件移动样品,MSA-100-3D 完成样品整个表面的振动分析,然后以图形方式显示振型。

配件和组件

Tripods, test stands, positioning stages

A-STD-TST-01 Test Stand

Test stand providing ample workspace. With motorized z-axis, travel range 200 mm.

A-STD-BAS-02 Base Stand

Rigid support for the sensor head. Includes manual focus block with 100 mm travel range with coarse and fine drive. Interfaces to commercially available optical tables.

A-STD-F50 Focus Block

Travel Range 50 mm. With coarse and fine drive for manual z-axis adjustment of the sensor head. Interfaces with commercially available wafer probe stations.

Vibration isolation, breadboards

A-TAB-AIR-01 Active Vibration Isolation Table

Air-damped vibration isolation table with active level adjustment. Compatibility: A-STD-TST-01 Test Stand, A-STD-BAS-02 Base Stand.

A-TAB-ELC-01 Active Vibration Isolation Table

Electronically controlled voice coil stabilization for highest isolation performance. Compatibility: A-STD-TST-01 Test Stand, A-STD-BAS-02 Base Stand.

A-WST-001 Workstation

Workstation for use with Polytec's A-TAB-AIR-01 and A-TAB-ELC-01 Active Vibration Isolation Tables.

Breadboard for optical testing of MEMS and microstructures with MSA Micro System Analyzers from Polytec
Breadboard for optical testing of MEMS and microstructures with MSA Micro System Analyzers from Polytec

A-BBO-ME02 Breadboard

Breadboard with metric hole pattern. Footprint 900 mm x 600 mm. Compatibility: A-STD-BAS-02 Base Stand.

A-AVI-MELA Active Vibration Isolation Breadboard

Electronically controlled for highest vibration isolation performance. With metric hole pattern. Footprint 600 x 800 mm. Compatibility: A-STD-BAS-02 Base Stand.


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