MEMS 和微系统的3D 振动测量

实物振动通常是三维振动。诚然,您可选择优先显示某特定方向的振动,但由于存在产品公差和其它影响,其它空间方向也会产生运动分量。 MSA-100-3D 显微系统分析可在大带宽范围内实时测量样本的动态特性,高分辨率同时记录和分析XYZ三个方向的振动分量,每向的振幅分辨率均达到亚皮米级。 

亮点

  • 实时振动测量,高达 25 MHz 的大带宽
  • 用于面外和面内振动测量,振幅分辨率达亚皮米级
  • 单点式和全场扫描式振动测量
  • 激光光斑小于 4光斑,横向分辨率极高
  • 测试距离大,可达38 mm
  • 可与普通 MEMS 探针测试台兼容

因为在3D 真实的生活中运动

因激光光斑极小,所以横向分辨率极高,且带宽高达 25 MHz,Polytec的MSA-100-3D 是用于微机电传感器和致动器 (MEMS) 以及其他微结构的振动测量的理想设备。通过软件移动样品,MSA-100-3D 完成样品整个表面的振动分析,然后以图形方式显示振型。

配件和组件

Tripods, test stands, positioning stages

A-STD-TST-01 Test Stand

Test stand providing ample workspace. With motorized z-axis, travel range 200 mm.

A-STD-BAS-02 Base Stand

Rigid support for the sensor head. Includes manual focus block with 100 mm travel range with coarse and fine drive. Interfaces to commercially available optical tables.

A-STD-F50 Focus Block

Travel Range 50 mm. With coarse and fine drive for manual z-axis adjustment of the sensor head. Interfaces with commercially available wafer probe stations.

Vibration isolation, breadboards

A-TAB-AIR-01 Active Vibration Isolation Table

Air-damped vibration isolation table with active level adjustment. Compatibility: A-STD-TST-01 Test Stand, A-STD-BAS-02 Base Stand.

A-TAB-ELC-01 Active Vibration Isolation Table

Electronically controlled voice coil stabilization for highest isolation performance. Compatibility: A-STD-TST-01 Test Stand, A-STD-BAS-02 Base Stand.

A-WST-001 Workstation

Workstation for use with Polytec's A-TAB-AIR-01 and A-TAB-ELC-01 Active Vibration Isolation Tables.

A-BBO-ME02 Breadboard

Breadboard with metric hole pattern. Footprint 900 mm x 600 mm. Compatibility: A-STD-BAS-02 Base Stand.

A-AVI-MELA Active Vibration Isolation Breadboard

Electronically controlled for highest vibration isolation performance. With metric hole pattern. Footprint 600 x 800 mm. Compatibility: A-STD-BAS-02 Base Stand.


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