微纳米技术
在微系统的研发与生产进程中，能够精准表征并实时监测设备质量的测量技术，需兼具精确性、可靠性与高效性，这一技术对于整个流程而言起着决定性作用。当下，微传感器在各类安全相关任务中承担的职责日益加重，这就对其可靠性及功能安全性提出了极为严苛的要求，也使得上述测量技术的重要性愈发凸显。在此情形下，稳固耐用的设计方案以及高精度的生产工艺成为了其中的关键要素 。
相关产品
MSA-600 显微式激光测振仪
MSA-600 显微式激光测振仪专为 MEMS 及显微结构测量而打造，是一款能够获取三维静态与动态特性的一体化光学测量解决方案。它在加速产品开发流程、优化产品质量控制方面表现卓越，甚至可集成至商用探针台，用于晶圆级测试。目前，该仪器的性能已提升至高达 8 GHz。
MSA-100-3D 显微式激光测振仪
3D显微式激光测振仪同时记录XYZ三个方向的振动分量，测试带宽覆盖DC~25 MHz，每向的振幅分辨率均达到亚皮米级，可用于面内和面外振动测试。
更多应用
- 触摸屏
![Laser vibration measurement for testing and validating haptics displays]( "Laser vibration measurement for testing and validating haptics displays")
Laser vibration measurement for testing and validating haptics displays - Shaker control
![VibroFlex QTec LDV for control of electronics board shaker test for reliable sensor systems]( "VibroFlex QTec LDV for control of electronics board shaker test for reliable sensor systems")
VibroFlex QTec LDV for control of electronics board shaker test for reliable sensor systems - 引线接合
![Optical measurement technology for Electronic, Semiconductor and Solar industry]()
Optical measurement technology for Electronic, Semiconductor and Solar industry - 太阳能技术
![Testing of solar panels, modules and solar technology]( "Testing of solar panels, modules and solar technology")
Testing of solar panels, modules and solar technology - 印刷电路板
![Operating deflection shape analysis of high voltage converter modules (by Siemens, measured by Polytec)]( "Operating deflection shape analysis of high voltage converter modules (by Siemens, measured by Polytec)")
Operating deflection shape analysis of high voltage converter modules (by Siemens, measured by Polytec)
