A new evaluation method for interferometric surface topography measurement which is robust against environmental disturbances

Installing manufacturing metrology as close as possible to the production line is the key to short feedback times to process parameters. Apart from finding the appropriate measurement technique with the required resolution, the solution has to be applied under unavoidable production conditions. Although white light interferometers (WLI), which provide surface data with details in micro- and nanometer dimensions, are accepted as important tools of modern manufacturing metrology, it should be borne in mind that environmental factors like vibrations may be a significant contributor to the measurement uncertainty without appropriate precautions.

Dieser Fachbeitrag ist im CIRP Journal of Manufacturing Science and Technology erschienen und bis zum 04. Juni 2021 hier kostenlos les- und downloadbar.