Microscope-based vibrometers
Microscope-based vibrometers
Inspired by the rapid further development of microelectromechanical systems and MEMS, Polytec presents this highly innovative product line of microscope-based measurement systems. MSA Micr System Analyzers from Polytec validate dynamics and topography of microsystems reliably with utmost precision. Determine transfer functions, use unique all-in-one instruments for both the static and dynamic 3D characterization of microsystems, measure and see through Si encapsulations and integrate your test-setup into (vacuum) probe stations.
MSA-650 IRIS Micro System Analyzer
The innovative and patented MSA-650 IRIS Micro System Analyzer allows for measuring true MEMS dynamics by characterizing both in-plane and out-of-plane motions through silicon encapsulation without contact, without need for preparing nor decapping the device.
MSA-600 Micro System Analyzer
The all-in-one optical measurement solution for static and dynamic 3D characterization of MEMS and microstructures. The MSA-600 advances development and QC processes - and integrated into commercially available probe stations it even allows testing on wafer-level.
MSA-100-3D Micro System Analyzer
The 3D Micro System Analyzer records vibration components in all three spatial directions at once. The optical measurement system enables high-resolution 3D vibration analysis with amplitude resolutions in the sub-picometer range, for both in-plane and out-of-plane vibration components.
MSA-050 Micro System Analyzer
Use the MSA-050 for entering the world of microsystem analysis, record and visualize vibrations and dynamics of small components and microsystems with laser precision over an entire surface. Micro System Analyzer use measurement lasers for non-contact studay of the true dynamics of small components in a completely non-invasive way.