After 18 successful Vibrometer User Meetings at its German headquarters over the past 35 years, Polytec is excited to launch the Microstructure User Meeting 2026. This premier international event will bring together experts and practitioners to explore cutting-edge developments in optical vibration measurement for MEMS, ultrasonic transducers, acoustic waves, and other microstructure applications.
Join us on Thursday, March 19, at Polytec Headquarters in Waldbronn, Germany, for a day of inspiring presentations, interactive discussions, and collaborative networking. Our aim is to create a high-level platform where knowledge is shared, new ideas emerge, and connections extend beyond our existing community.
Key Topics of the Event are:
MEMS Mirrors
MEMS Microphones
MEMS Membranes and Pressure Sensors
CMUT & PMUT
Inertial Sensors
Wafer Mapping of MEMS Devices
SAW Components & Microfluidics
Cantilevers and AFM Tips
Associated Optical Measurement Systems:
MSA-600 Micro System Analyzer
The all-in-one optical measurement solution for static and dynamic 3D characterization of MEMS and microstructures- now for up to 8 GHz! The MSA-600 enhances microsystem development and quality inspections - also allowing testing on wafer-level when integrated into commercially available probe stations.
MSA-650 IRIS Micro System Analyzer
The innovative and patented MSA-650 IRIS Micro System Analyzer with IR capability allows for measuring true MEMS dynamics up to 25 MHz by characterizing both in-plane and out-of-plane motions through silicon encapsulation without contact, without need for preparing nor decapping the device.
MSA-060 Micro System Analyzer
Use the MSA-060 for entering the world of microsystem analysis. Record and visualize vibrations and dynamics of small components and microsystems with laser precision over an entire surface from DC to 24 MHz. Micro System Analyzers use measurement lasers, revealing the true dynamics of small components in a completely non-contact and non-invasive way.
VibroScan QTec Neo
VibroScan QTec Neo measures vibrations in a new way - without contact, full-field and with unprecedented precision. For the first time, QTec® technology has been successfully transferred from the infrared SWIR laser to the visible helium-neon laser. Featuring a small laser measuring spot, the precise helium-neon laser is suitable for measurements on the finest structures and even measures in and through water. QTec® always ensures a stable signal and the best signal-to-noise ratio. VibroScan QTec Neo ensures maximum portability with integrated data acquisition and signal generator up to 32 MHz.
Why should attend
The Polytec Microstructure User Meeting is a focused international event that brings together experts and practitioners in the field of microstructure dynamics and MEMS characterization. This one-day meeting offers a high-level platform for knowledge exchange, fostering collaboration between industry and research, and exploring the latest trends and applications in optical measurement of microstructure.
- Keynotes
- Presentations and Applications
- Hands-On Microsystems Workshop
- Latest Measurement- and Testing-Systems
- Networking Opportunities
- Lunch + Coffee
Preliminary Agenda
- Welcome – Dr. Fuchs, St. Zimmer (Polytec)
- MEMS microphones – Prof. A. Dehé (HSG)
- MEMS PMUT and encapsulated inertial sensors – Dr. Forke, S. Voigt (ENAS)
- LIDAR micromirrors – Dr. Hwang (ISIT)
- HQ mechanical oscillators – Prof. H. Weber (FAU)
- SAW microacoustic devices – Dr. Schmidt (IFW)
- Response functions around 5 GHz - n.n. (CEA Leti)
- Wafer mapping prober – V. Hänsel (MPI/ATV)
- Parameter extraction – Dr. Michael (IMMS)
The afternoon bevor, on Wednesday 18th, it is planned to give a “Hands-On Session” and get together with an “Ice Breaker Dinner”. So please save the date and stay informed. Also note, that all presentations and conference language is English.
Online-Registration
Registration fee
participation is free of charge, application form is required
Registration untill
18.01.2026
I would like to participate as a speaker
I would like to participate on site
I would like to participate but already have appointments
Interesting applications
Electronics, semiconductors and solar
Polytec’s optical vibration sensors with laser vibrometers are indispensable tools for you – whether you’re carrying out dynamic tests in research, design and industrial testing, or monitoring processes such as the bond process when manufacturing power electronics.