User Insights for Your Work
Polytec is excited to launch the 3rd Microstructure User Meeting 2027. This international event will bring together experts and practitioners to explore cutting-edge developments in optical vibration measurement for MEMS, ultrasonic transducers, acoustic waves, and other microstructure applications.
Join us in November 2027, at Polytec Headquarters in Waldbronn, Germany, for a day of inspiring presentations, interactive discussions, and collaborative networking. Our aim is to create a high-level platform where knowledge is shared, new ideas emerge, and connections extend beyond our existing community.
Be part of the Microstructure User Meeting 2027
Would you like to attend the Microstructure User Meeting 2027—or share your expertise with the community as a speaker?
- Leave your contact details in the form below to receive early updates on the event, including programme details, registration and opportunities to contribute.
- We will notify you by email as soon as new information becomes available.
Topics covered at the meeting
- MEMS Mirrors
- Characterisation and dynamic analysis of MEMS mirrors, including applications for LIDAR.
- MEMS Microphones
- Measurement approaches for the acoustic characterisation of MEMS microphones.
- MEMS Membranes and Pressure Sensors
- Vibration analysis of membranes and pressure sensors.
- CMUT & PMUT
- Capacitive and piezoelectric micromachined ultrasonic transducers.
- Inertial Sensors
- Optical measurement of inertial sensors and packaged microsystems.
- Wafer Mapping of MEMS Devices
- Area-wide characterisation of complete wafers with automated probers.
- SAW Components & Microfluidics
- Surface acoustic waves and microfluidic applications.
- Cantilevers and AFM Tips
- Dynamic measurements of cantilevers and atomic-force-microscopy probes.
Why you should attend
The Polytec Microstructure User Meeting is a focused international event that brings together experts and practitioners in the field of microstructure dynamics and MEMS characterization.
This one-day meeting offers a high-level platform for knowledge exchange, fostering collaboration between industry and research, and exploring the latest trends and applications in optical measurement of microstructures.
- Keynotes
- Presentations and Applications
- Hands-On Microsystems Workshop
- Latest Measurement and Testing Systems
- Networking Opportunities
- Lunch + Coffee
Share your expertise at the Microstructure User Meeting 2027
Are you working on innovative MEMS, microsystem or microstructure applications? We invite researchers, engineers and industry experts to share their experience, measurement challenges and application insights with the community.
- If you are interested in presenting your work at the Microstructure User Meeting 2027, let us know using the form below.
- We will keep you informed about upcoming speaker opportunities, submission details and event updates.
Microstructure User Meeting 2026: A Growing Forum for the Community
The second Polytec Microstructure User Meeting 2026 was a great success. On 19 March 2026, experts and practitioners from around the world met at Polytec headquarters in Waldbronn to discuss current developments in optical vibration measurement of microstructures.
Following the first Microstructure User Meeting, held on 24 October 2019, and building on Polytec’s long-standing Vibrometer User Meeting tradition, the event provided a dedicated forum for the MEMS and microsystems community. The highly positive feedback from participants confirmed that this format meets a clear need across the field.
10 technical presentations from industry and researchTU Wien, HSG, Fraunhofer ENAS, Fraunhofer ISIT, Friedrich-Alexander-Universität Erlangen-Nürnberg, Leibniz-Institut IFW, CEA-Leti Grenoble, IMMS GmbH and Polytec. |
Hands-on microsystems workshopLive demonstrations with Polytec MSA systems and laboratory tours during the pre-event programme. |
International expert networkParticipants from research institutes and industry worldwide, with all presentations delivered in English. |
Ice Breaker DinnerAn informal evening on 18 March provided a relaxed start to the meeting and enabled early networking. |
Free attendanceThe meeting was free of charge for all participants, including catering and event materials. |
"The MSA was a game changer for us. To correlate the modes to spektra was so important for us."
"Since our measurements sometimes take days, we have to be sure
that the measurement system is stable the whole time."
"Please keep the „Bring Your Sample“ philosophy."
Presentations and speakers
| Topic | Presentation · Speaker |
|---|---|
| Piezoelectric microsystems | Piezoelectric microsystems at TU Wien Assoc.Prof. Michael Schneider, Institut für Sensor- und Aktuatorsysteme · TU Wien |
MEMS PMUT and encapsulated inertial sensors
| Characterization of resonant MEMS-PMUTs and encapsulated inertial sensors – at wafer level Dr. Roman Forke and Sven Voigt · FHI-ENAS |
| MEMS microphones | Three-dimensional folded MEMS platform for area-efficient piezoelectric sensors and actuators Dr. Achim Bittner · HSG |
| LIDAR micromirrors | Development and optimization of micromirrors for LIDAR applications Dr. Jeong-Yeon Hwang · FHI-ISIT |
| HQ mechanical oscillators | Highest-quality-factor mechanical oscillators as components for future quantum technologies Prof. Heiko Weber · FAU Erlangen |
| SAW microacoustic devices | Materials for the technologies of tomorrow: Advanced in-situ characterization of surface acoustic wave based microacoustic devices Dr. Hagen Schmidt · Leibniz-Institut IFW |
| Response functions around 5 GHz | Demonstrating MSA-600-S capabilities to understand electrical response of a BAW resonator around 5 GHz Dr. Alexandre Reinhardt · CEA-Leti Grenoble |
| Wafer mapping prober | Wafer mapping using versatile automatic Prober TS2000 in combination with Micro System Analyzer Volker Hänsel · MPI/ATV |
| Parameter extraction | Parameter extraction at wafer level for process monitoring in semiconductor manufacturing Steffen Michael · IMMS GmbH |
Hands -on Applications & Demo setups
Microstructure User Meeting 2026 | International Conference Highlights
Interesting applications
Electronics, semiconductors and solar
Polytec’s optical vibration sensors with laser vibrometers are indispensable tools for you – whether you’re carrying out dynamic tests in research, design and industrial testing, or monitoring processes such as the bond process when manufacturing power electronics.
Microtechnology and nanotechnology
Precise, reliable and fast measuring technology for characterizing and monitoring the quality of devices is decisive in developing and producing microsystems. This is all the more important since microsensors are increasingly taking over safety-related tasks too – placing high demands on reliability and functional safety.
How laser vibration measurement helps in R&D
Laser vibrometry focusing on the small details
- Characterize small and delicate structures in a non-contact way.
- Analyze vibrations, acoustics and dynamics.
- Measure biomedical samples, electronic components and microstructures like MEMS using light, without mass-loading, and from DC up to the GHz range on a large bandwidth.
Laser vibrometers focus on the small details, measuring deflection shapes for model validation. They assess the frequency response and determine resonance frequency, impulse response, and Q-factor.
No matter how big or small – Polytec vibrometers measure it!
Associated Optical Measurement Systems
Analyseur de microstructures 3D MSA-100
L'analyseur de microstructures saisit simultanément des composantes vibratoires dans les trois directions spatiales. Le système de mesure optique permet une analyse vibratoire 3D à haute résolution du courant continu jusqu'à 25 MHz avec des résolutions d'amplitude de l'ordre du sous-picomètre, pour les composantes vibratoires dans le plan et hors du plan.
Analyseur de microstructures MSA-600
Système de mesure tout-en-un pour la caractérisation 3D statique et dynamique des MEMS et des microstructures - maintenant jusqu'à 8 GHz. Le MSA-600 améliore les processus de développement et de contrôle qualité. Intégré aux stations sous pointes disponibles dans le commerce, il permet des tests au niveau des wafer.
Analyseur de microstructures MSA-060
Utilisez le MSA-060 pour entrer dans le monde de l'analyse des microsystèmes. Enregistrez et visualisez les vibrations et la dynamique de petits composants et microsystèmes avec une précision laser sur toute une surface, de DC à 24 MHz. Les analyseurs de microsystèmes utilisent des lasers de mesure qui révèlent la véritable dynamique des petits composants sans contact et de manière non invasive.
VibroScan QTec Neo
VibroScan QTec Neo mesure les vibrations d’une manière nouvelle - sans contact, sur l’ensemble de la surface et avec une précision sans précédent. Pour la première fois, la technologie QTec® a été transférée avec succès du laser SWIR infrarouge au laser visible hélium-néon. Doté d’un petit point de mesure laser, le laser hélium-néon précis convient aux mesures sur les structures les plus fines et peut même mesurer dans l’eau et à travers celle-ci. QTec® garantit toujours un signal stable et le meilleur rapport signal/bruit. VibroScan QTec Neo assure une portabilité maximale grâce à l’acquisition de données intégrée et au générateur de signal allant jusqu’à 32 MHz.
