Dynamic characterization of meso-components and microstructures
Vibration measurement of small structures such as electronic components, MEMS, or medical components is particularly simple and precise with Polytec’s laser Doppler vibrometers. These systems enable the dynamic characterization of meso-components and microstructures non-contact, reliably, and with the highest resolution.
Thanks to their wide frequency range extending into the GHz range, the measurement systems capture vibration modes, resonances, and frequency responses just as accurately as impulse responses and damping behavior. This allows simulations and analysis results to be precisely validated and development processes to be significantly simplified.
Solutions for meso-component measurement
The VibroScan QTec is a versatile full-field vibrometer for the dynamic characterization of complex structures ranging from a few cm² to m². Through optical extensions, the scanning range can be easily adapted to meso and micro ranges - with the highest resolution, measurement stability, and without changing systems.
Precise vibration measurement of small structures
The new adapter for microscope objectives expands Polytec scanning vibrometers into flexible tools for the vibration analysis of meso and microstructures. It is perfect for applications in consumer electronics, MEMS, medical technology, and sensor technology. The unique VibroScan QTec Neo offers reliable control of the measurement position and, through its short wavelength, spot sizes below 2 µm at 10× magnification and high numerical aperture. It thus enables precise measurements of the smallest areas without having to switch to specialized microsystem analyzers.
VibroScan QTec – the all-rounder in vibration measurement technology
The VibroScan QTec Scanning Laser Vibrometer from Polytec is a true all-rounder: It is suitable for both large-area structures, such as vibration analyses on car bodies or machine components, and for the high-resolution analysis of the smallest microstructures.
With the right accessories, the system covers the entire measurement range from the macro to the micro level.
Advanced Applications with VibroScan
With the microscope extension, the typical range of applications for the VibroScan expands from the macro range through the cm and mm meso range into the micro range.
- MEMS and micromechanics
- High-resolution operating deflection shapes of MEMS actuators and sensor elements, including evaluation of resonance behavior and frequency responses.
- Consumer Electronics
- Detailed analysis of smartphone components such as camera modules, focus drives, haptic actuators, as well as circuit board effects such as "singing capacitors."
- Medical and Biological Applications
- Investigation of mechanical components in medical devices or biological samples within the accessible size range.
- Structural Dynamics of Compact Assemblies
- Identification of local vibration hotspots, recording of operating deflection shapes, and validation of FEM models at the meso scale.
- Wire bonding and semiconductor packaging
- Characterization of the ultrasonic vibration behavior of bonding capillaries and bonding tools in real-time for process optimization and quality assurance in semiconductor manufacturing.
- Haptic Actuators and Feedback Systems
- Validation of haptic motors and LRA actuators using time-sequence velocity measurements, as well as visualization of wave propagation in haptic displays, from development through to manufacturing quality assurance, particularly in the automotive sector.
Contact your PolyXpert
Contact your PolyXpert
Discuss your requirements with our experts.
We would be happy to show you in a short demo how easy and efficient measurements are with a microscope extension - either on our components or directly on your part.
Close-up with coaxial unit
The PSV coaxial unit precisely aligns the optical center of the integrated camera with the laser beam axis, enabling parallax-free measurements.
The optional micro-scan lens on the front allows the field of view to be precisely adjusted: the laser spot diameter is reduced while the magnification can be increased. This enables measurements with even higher resolution, ideal for small or highly structured measurement objects.
A special feature of this optics is the ability to align the laser beam parallel to the object surface, even during scan measurements.
This allows reliable measurement of even reflective surfaces, as the reflected light is captured securely. This ensures stable and reproducible results.
Microscope Extension
The microscope extension serves as an adapter for mounting microscope objectives on the close-up unit. It provides access to even higher magnifications than with conventional micro-scan lenses and extends the range of precise vibration measurements into the micro range.
Integrated, coaxial LED illumination ensures optimal illumination and the highest image quality, regardless of the selected objective magnification. This allows for the flexible use of different microscope objectives.
At 10× magnification, the laser spot diameter can be reduced to just 2 µm, which is a prerequisite for high-precision measurements of the finest structures in research and development.
Non-contact vibrometry for meso-components and microstructures
From cm² to the µm range: Learn how VibroScan QTec precisely characterizes the dynamic properties of small, embedded structures such as camera modules, MEMS microphones, or bonding wires, and how it extends the measurement setup into the meso and micro ranges with compatible additional optics.
More applications
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