用于精密和超精密机械的表面计量学

亮点

以微米精度检测大面积形状，以纳米分辨率分析粗糙度

在生产或在线过程中进行快速高效的面积测量

捕捉大型 UP 加工表面，视场角最大可达 230x220 毫米

70 毫米大扫描范围，可扫描深孔和凹陷区域

自动模式识别功能无需机械夹具即可进行多样品测量

智能扫描技术可对所有表面和材料（光滑和粗糙）进行测量

Inspecting surface flatness, steps, angle and parallelism on the cuvette of a NIR spectroscope for ultra-precise alignment and positioning

Resolve ultra-precision machined surfaces with sub-nm precision, evaluate finish and areal roughness Sa, Sq, Sz

Quality control of machined parts on production-level

Telecentric lens with 70mm large Z range reaches the insides of holes and deep steps

Pass-fail analysis using surface metrology in a production line

Large image field and automatic pattern recognition allow multi-sample measurements in one shot - without manual positioning or fixture

Inspecting surface flatness, steps, angle and parallelism on the cuvette of a NIR spectroscope for ultra-precise alignment and positioning

Resolve ultra-precision machined surfaces with sub-nm precision, evaluate finish and areal roughness Sa, Sq, Sz

Quality control of machined parts on production-level

Telecentric lens with 70mm large Z range reaches the insides of holes and deep steps

Large image field and automatic pattern recognition allow multi-sample measurements in one shot - without manual positioning or fixture

利用大视场进行快速高效的表面检测

TopMap 白光干涉仪可在更大的区域、更大的样品甚至多个样品上测量形状参数和三维形貌，而无需缝合。在生产层面，一键式测试解决方案使用预定义的测量配方，利用高速度和可重复性显著提高测试效率。对于材料研究和超精密加工表面的光洁度检测，基于显微镜的轮廓仪可研究（亚）纳米范围内的粗糙度参数！

TopMap 轮廓仪可捕捉整个工件，单幅图像尺寸为 44x33 毫米，无需拼接。基于图像拼接的扩展视场可达 230x220 毫米区域。这种配置非常适合测量平面度、调查平行度，凭借远心光束路径和 70 毫米的大垂直范围，TopMap 白光干涉仪可以安全地测量底部截面和钻孔等深层区域。非接触式方位扫描可在数秒内单次采集超过 200 万个数据点，完美呈现真实形状、波纹，甚至生成材料直方图。利用集成的模式识别算法，大视场可进行多样品测量，无需手动定位，从而大大节省了测试时间，尤其是在生产层面。

使用 230x220 毫米扩展视场角拍摄区域？

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Material ratio curve enabling the analysis of a flat lapped surfaces and a face milled surface

Comparing the material ratio curves of precision machined surfaces: Flat Lapping vs Face Milling

Material ratio curve: here split view into Peak, Core and Scoring sections by geometrical considerations

Ra, Rz roughness values as quality parameter? Differently machined surfaces might not always reveal different Ra, Rz parameters

Quality control on grinding patterns, analyzing ground, lapped or polished surfaces

Comparing the material ratio curves of precision machined surfaces: Flat Lapping vs Face Milling

Material ratio curve: here split view into Peak, Core and Scoring sections by geometrical considerations

Ra, Rz roughness values as quality parameter? Differently machined surfaces might not always reveal different Ra, Rz parameters

Quality control on grinding patterns, analyzing ground, lapped or polished surfaces

材料分布和材料比例曲线

通过对材料分布的详细描述，可以改变超精密加工产品表面的性能，并相应地优化要求。TopMap 光学轮廓仪可在实验室和生产中快速、精确地捕捉表面。在某些应用中，通过在一个表面上分布金刚石颗粒来增加摩擦力，有助于防止接触表面发生不理想的相对运动。通过改变颗粒的大小、形状和数量可以达到所需的摩擦力水平。TopMap 三维轮廓仪有助于可靠地评估详细的材料分布。