测试 MEMS 的可靠性和使用寿命
MEMS 传感器和致动器是许多设备和系统中的关键功能元件，并越来越多地具有安全相关功能，它们在整个服役期间往往工作环境苛刻，因此必须确保它们性能可靠、稳定。
因此，MEMS 部件必须在这些条件下进行测试验证。在真空室或气候测试室，对MEMS模块施加如机械激励或辐射，来模拟压力负载或空气湿度影响，在加速老化试验中验证其在长时间条件下的功能稳定性。
与传统半导体元件不同， MEMS 特征在于将移动的微机械部件作为其关键功能元件，因此，在进行可靠性和使用寿命测试时，测量机械系统动态特性的能力就至关重要。
Polytec Magazine
Exciting vibration
精密测量自激励多悬臂梁MEMS微器件的振动
实际示例：
实际示例：真空室中 MEMS 的振动测量
鉴于此，Polytec 显微系统分析仪能满足所有相关的测试需求。集多种功能于一体的测试系统还可配备能远距离测试的特殊镜头，可从测试室外部测量组件的静态和动态特性。
使用Polytec公司的MSA 测量环境压力对 MEMS 模块动态特性的影响，可结合真空室或真空探针台，完成晶片级测试。
Microstructure characterization
相关产品
MSA-100-3D显微式激光测振仪
显微系统分析仪同时记录所有三个空间方向上的振动分量，能高分辨率进行面内和面外3D振动分析，其振幅分辨率在亚皮米范围内。
MSA-600显微式激光测振仪
MSA-600显微式激光测振仪专用于测量MEMS和显微结构，是获取三维静态特性与动态特性的一体化光学测量解决方案，其有助于加快产品开发进程，优化产品质量控制，甚至可集成至商用探针台上进行晶圆级测试。现在高达 6 GHz。
更多应用
- 晶片级
![Deflection shape after modal testing microacoustic device on wafer level]( "Deflection shape after modal testing microacoustic device on wafer level")
Deflection shape after modal testing microacoustic device on wafer level - MEMS样机试验
![MEMS prototype testing, here a CMOS / MEMS co-integrated flow microsensor, (C) University of Louvain, Belgium]( "MEMS prototype testing, here a CMOS / MEMS co-integrated flow microsensor, (C) University of Louvain, Belgium")
MEMS prototype testing, here a CMOS / MEMS co-integrated flow microsensor, (C) University of Louvain, Belgium - cMUTs and pMUTs
![Laser Doppler vibrometer measurements of several leaking CMUT cells visualizing dynamic displacement]( "Laser Doppler vibrometer measurement of leaking CMUT transducer cells")
Laser Doppler vibrometer measurements of several leaking CMUT cells, visible with a much lower dynamic displacement when operating the device - SAWs and BAWs
![Dynamic measurement of a SAW surface acoustic wave filter]( "Dynamic measurement of a SAW surface acoustic wave filter")
Dynamic measurement of a SAW surface acoustic wave filter - FEM 验证
![Eigen frequency of RF-MEMS switch for FEM simulation validation, G. Schrag University of Munich]( "Eigen frequency of RF-MEMS switch for FEM simulation validation, G. Schrag University of Munich")
Determination of Eigen frequency as one phase in the parameter extraction and calibration procedure of an energy-coupled simulation model of an RF-MEMS switch, G. Schrag University of Munich - 细观
![Laser vibration measurement for testing micro-mechanical MEMS]( "Laser vibration measurement for testing micro-mechanical MEMS")
Laser vibration measurement for testing micro-mechanical MEMS - 生物 MEMS
![Deflection shape of cMUT transducer array, University of Alberta]( "Deflection shape of cMUT transducer array, University of Alberta")
Deflection shape of cMUT transducer array, University of Alberta
