在生物学和医学中的应用
在大部分医学和生物应用中，MEMS结构是关键的基础性和代表性技术。显微分析系统应用范围广泛，从用于快速医疗诊断的芯片实验室高频表面波应用、到助听器的 MEMS 麦克风、再到基于微系统技术的用于医疗成像的超声换能器。
您可以依赖 Polytec 基于显微镜的非接触式光学测量技术，来确定医疗 MEMS 传感器和致动器的表面形貌和动态特性。例如，基于显微镜的振动测量也用于从自然到技术系统的仿生启发式“技术转移”，如测量昆虫听力的生物力学。
实际示例：
微机械压电超声换能器 (pMUTs)不断突破实时 3D 医学成像（超声检查）的应用极限，如血管内超声 (IVUS) 和超声心动图等。
Polytec显微系统分析仪采用非接触式测量方法，在高频（~10MHz）高空间分辨率（<1μm）条件下，最高精度测量超声换能器的微机械结构的振动特性。
Development of phononic surface acoustic wave devices
Phononic surface acoustic wave devices have shown great potential for enabling integrated point-of-care diagnostics, using the mechanical energy carried by sound to manipulate liquid samples from patients on low-cost microchips. Reserachers have demonstrated the detection of malaria [Reboud J. et al., PNAS, 2012, 15162-7] from the volume of a fingerprick of blood using an acoustic filter. Laser vibrometry is an essential tool of the development process that permits the visualization of true vibrations on the surface across the entire microchips, thus validating our designs. In the future, more complex assays will be integrated on the platform to detect diseases such as tuberculosis.
Microstructure characterization
相关产品
MSA-600显微式激光测振仪
MSA-600显微式激光测振仪专用于测量MEMS和显微结构，是获取三维静态特性与动态特性的一体化光学测量解决方案，其有助于加快产品开发进程，优化产品质量控制，甚至可集成至商用探针台上进行晶圆级测试。现在高达 6 GHz。
MSA-060显微式激光测振仪
MSA-060显微式激光测振仪是一款紧凑型光学测量系统，用于全面评估MEMS和微系统的振动特性、精密机械动力学和电子产品的可靠性，测试带宽覆盖DC~24MHz。 系统采用激光作为探测手段，以非接触、无损检测方式帮助用户获取被测微型元器件的动力学特性。
更多应用
- 晶片级
![Deflection shape after modal testing microacoustic device on wafer level]( "Deflection shape after modal testing microacoustic device on wafer level")
Deflection shape after modal testing microacoustic device on wafer level - MEMS样机试验
![MEMS prototype testing, here a CMOS / MEMS co-integrated flow microsensor, (C) University of Louvain, Belgium]( "MEMS prototype testing, here a CMOS / MEMS co-integrated flow microsensor, (C) University of Louvain, Belgium")
MEMS prototype testing, here a CMOS / MEMS co-integrated flow microsensor, (C) University of Louvain, Belgium - cMUTs and pMUTs
![Laser Doppler vibrometer measurements of several leaking CMUT cells visualizing dynamic displacement]( "Laser Doppler vibrometer measurement of leaking CMUT transducer cells")
Laser Doppler vibrometer measurements of several leaking CMUT cells, visible with a much lower dynamic displacement when operating the device - SAWs and BAWs
![Dynamic measurement of a SAW surface acoustic wave filter]( "Dynamic measurement of a SAW surface acoustic wave filter")
Dynamic measurement of a SAW surface acoustic wave filter - FEM 验证
![Eigen frequency of RF-MEMS switch for FEM simulation validation, G. Schrag University of Munich]( "Eigen frequency of RF-MEMS switch for FEM simulation validation, G. Schrag University of Munich")
Determination of Eigen frequency as one phase in the parameter extraction and calibration procedure of an energy-coupled simulation model of an RF-MEMS switch, G. Schrag University of Munich - 细观
![Laser vibration measurement for testing micro-mechanical MEMS]( "Laser vibration measurement for testing micro-mechanical MEMS")
Laser vibration measurement for testing micro-mechanical MEMS - 可靠性
![Vibration measurements for reliability testing on MEMS in a vacuum chamber]( "Vibration measurements for reliability testing on MEMS in a vacuum chamber")
Vibration measurements for reliability testing on MEMS in a vacuum chamber
