Measuring dynamic response and topography of MEMS and microstructures
Surface topography and dynamic motion analysis and visualization are key to testing and developing microstructures such as MEMS devices (Micro-Electro-Mechanical Systems). They are indispensable for validating FE calculations, determining cross-talk effects and measuring surface deformation. The MSA-600 Micro System Analyzer is the all-in-one optical measurement workstation for characterizing surface topography as well as in-plane and out-of-plane motions.
The versions MSA-600-M/V cover frequency ranges up to 25 MHz, ideally suited for MEMS, MEMS microphones and other microsystems. The versions MSA-600-X/U cover the high and very high frequency range up to 2.5 GHz, perfect for the assessment of HF MEMS resonators, micro-acoustic devices like SAW, BAW and more.
PREMIERE:
The MSA-600-S is the specialized optical measurement workstation designed for 6 GHz real-time vibration analysis and surface topography analysis. Ideal for testing GHz MEMS like FBAR (film bulk acoustic resonators), BAW (bulk acoustic wave) filters and SAW (surface acoustic wave) devices.
Highlights
- All-in-one optical measurement workstation for microstructures
- Real-time response measurement (no post-processing required)
- Versions MSA-600-M/V with up to 25 MHz
- Versions MSA-600-X/U with up to 2.5 GHz
- NEW MSA-600-S with up to 6 GHz
- Unparalleled sub-pm displacement resolution
- Fast measurement and visualization of deflection shapes
- Straightforward and intuitive operation
- Automated system for easy integration into probe stations
- Import / export options for FE model validation
Wafer-level and single-die testing
Accessories and components
Optical accessories
A-MOB-xxxx Bright Field Objectives
For out-of-plane and in-plane vibration measurement. Available magnifications: 1x, 2x, 5x, 10x, 20x, 50x, 100x and 3.6x, 10x for large working distances.
Tripods, test stands, positioning stages
A-STD-TST-01 Test Stand
Test stand providing ample workspace. With motorized z-axis, travel range 200 mm.
A-STD-BAS-02 Base Stand
Rigid support for the sensor head. Includes manual focus block with 100 mm travel range with coarse and fine drive. Interfaces to commercially available optical tables.
A-STD-F50 Focus Block
Travel range 50 mm. With coarse and fine drive for manual z-axis adjustment of the sensor head. Interfaces with commercially available wafer probe stations.
Vibration isolation, breadboards
A-TAB-AIR-01 Active Vibration Isolation Table
Air-damped vibration isolation table with active level adjustment. Compatibility: A-STD-TST-01 Test Stand, A-STD-BAS-02 Base Stand.
A-TAB-ELC-01 Active Vibration Isolation Table
Electronically controlled voice coil stabilization for highest isolation performance. Compatibility: A-STD-TST-01 Test Stand, A-STD-BAS-02 Base Stand.
A-BBO-ME02 Breadboard
Breadboard with metric hole pattern. Footprint 900 mm x 600 mm. Compatibility: A-STD-BAS-02 Base Stand.
A-AVI-MELA Active Vibration Isolation Breadboard
Electronically controlled for highest vibration isolation performance. With metric hole pattern. Footprint 600 x 800 mm. Compatibility: A-STD-BAS-02 Base Stand.
Miscellaneous
A-ESG-001 External Signal Generator
For high frequency, broadband sample excitation. Remotely controllable by PSV Software.
A-SPK-0008 Wafer Prober Module
Together with the A-PST-200P XY Positioning Stage, the wafer prober module forms a motorized platform for electrical contacting and high-precision measurement of wafers and substrates up to 200 mm in diameter.
A-SPK-0010 Vacuum Prober Module
Vacuum and purge lines. Micro manipulator for handling of four electrical probes.