Caracterisation dynamique 3D et mesure de topographie des MEMS
La topographie de surface, l'analyse et la visualisation des mouvements dynamiques sont essentielles pour tester et développer des microstructures telles que les dispositifs MEMS (Micro-Electro-Mechanical Systems). Elles sont indispensables pour valider les calculs FE et mesurer la déformation de la surface.
Points forts
- Station de mesure optique tout-en-un pour les microstructures
- Mesures de réponse en temps réel (aucun post-traitement requis)
- Résolution de déplacement sub-pm inégalée
- Mesure rapide et visualisation des déformées 3D
- Fonctionnement simple et intuitif
- Système automatisé pour une intégration facile sur stations sous pointes
- Options d'importation / exportation pour la validation du modèle FE
Wafer-level and single-die testing
Accessories and components
Optical accessories

A-MOB-xxxx Bright Field Objectives
For out-of-plane and in-plane vibration measurement. Available magnifications: 1x, 2x, 5x, 10x, 20x, 50x, 100x and 3.6x, 10x for large working distances.
Tripods, test stands, positioning stages

A-STD-TST-01 Test Stand
Test stand providing ample workspace. With motorized z-axis, travel range 200 mm.

A-STD-BAS-02 Base Stand
Rigid support for the sensor head. Includes manual focus block with 100 mm travel range with coarse and fine drive. Interfaces to commercially available optical tables.

A-STD-F50 Focus Block
Travel Range 50 mm. With coarse and fine drive for manual z-axis adjustment of the sensor head. Interfaces with commercially available wafer probe stations.
Vibration isolation, breadboards

A-TAB-AIR-01 Active Vibration Isolation Table
Air-damped vibration isolation table with active level adjustment. Compatibility: A-STD-TST-01 Test Stand, A-STD-BAS-02 Base Stand.

A-TAB-ELC-01 Active Vibration Isolation Table
Electronically controlled voice coil stabilization for highest isolation performance. Compatibility: A-STD-TST-01 Test Stand, A-STD-BAS-02 Base Stand.

A-WST-001 Workstation
Workstation for use with Polytec's A-TAB-AIR-01 and A-TAB-ELC-01 Active Vibration Isolation Tables.

A-BBO-ME02 Breadboard
Breadboard with metric hole pattern. Footprint 900 mm x 600 mm. Compatibility: A-STD-BAS-02 Base Stand.

A-AVI-MELA Active Vibration Isolation Breadboard
Electronically controlled for highest vibration isolation performance. With metric hole pattern. Footprint 600 x 800 mm. Compatibility: A-STD-BAS-02 Base Stand.
Miscellaneous

A-ESG-001 External Signal Generator
For high frequency, broadband sample excitation.

MSA-A-WPM Wafer Prober Module
Together with the A-PST-200P XY Positioning Stage, the wafer prober module forms a motorized platform for electrical contacting and high-precision measurement of wafers and substrates up to 200 mm in diameter.