3D Vibration Measurement for MEMS and Microsystems
Real objects’ vibrations are usually three-dimensional. While you can indeed show preferential directions, production tolerances and other influences lead to movement components in other spatial directions too. You can use the MSA-100-3D Micro System Analyzer to analyze your sample’s dynamic behaviour in an integrated way, over a wide bandwidth and in real time. The vibration components in all three spatial directions are recorded simultaneously in high resolution and are analyzed as an integrated data record. You achieve the sub-picometer amplitude resolution typical of laser vibrometers regardless of the direction of vibration.
Because real life happens in 3D
Together with the high lateral resolution caused by a microscopic laser spot and the frequency bandwidth of up to 25 MHz, the Polytec MSA-100-3D is the ideal measuring device for characterizing microelectromechanical sensors and actuators (MEMS), other microstructures and biological samples. For full-field characterization the MSA-100-3D analyzes samples over the entire surface by having the software scan the sample and then graphically represent the deflection shapes.
You use the entry-level device for microscope vibrometry to record vibrations on small components and microsystems with a high degree of precision over the entire surface. The device works contactlessly and therefore measures the dynamics of even small samples...
The all-in-one instrument – the only one of its kind in the world – for static and dynamic 3D characterization of MEMS and microstructures. If you combine Polytec’s microscope-based instruments with commercially available probe stations, you can carry out...
You can use the UHF Ultra High Frequency Vibrometer to analyze out-of-plane vibrations up to 2.4 GHz for comprehensive analysis of transient events in real-time.