Highlights
Ask for our PolyXperts measurement service, using this patented, cutting-edge laser technology for immediate analysis w/o investment
- Superior separation of individual device layers in capped MEMS delivers the true dynamical MEMS behaviour
- Extracting real motion data even from complex-structured Si-capped MEMS
- High resolution modal data up to 25 MHz for straighforward FE model validation of MEMS in final state
- Integrated high performance IR microscope allows for measuring through SI walls
- Video microscope measuring mode revealing in-plane motion up to 2.5 MHz
- Standard data export formats for modal data, graphics and video for direct post-processing
- Free ScanViewer and desktop software for viewing and sharing measurement results