Micro and nanotechnology
Precise, reliable and fast measuring technology for characterizing and monitoring the quality of devices is decisive to in developing and producing microsystems. This is all the more important since microsensors are increasingly taking over safety-related tasks too – placing high demands on reliability and functional safety. A robust design and high production precision play a key role in this regard.
For more information, visit the application area microtechnology and nanotechnology.
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MSA IRIS Measurement Service
This brand new, patented measurement technology allows for comprehensive and representative analysis of Si encapsulated MEMS, measuring dynamics right through silicon caps. Our PolyXperts are looking forward to receiving your capped MEMS samples for modal testing, feasibility studies and consulting throughout all phases from development over prototyping to manufacturing of your encapsulated microstructures.
MSA-600 Micro System Analyzer
The all-in-one optical measurement solution for static and dynamic 3D characterization of MEMS and microstructures- now for up to 6 GHz! The MSA-600 enhances microsystem development and quality inspections - also allowing testing on wafer-level when integrated into commercially available probe stations.
MSA-100-3D Micro System Analyzer
The 3D Micro System Analyzer records vibration components in all three spatial directions at once. The optical measurement system enables high-resolution 3D vibration analysis from DC up to 25 MHz with amplitude resolutions in the sub-picometer range, for both in-plane and out-of-plane vibration components.
