Microfluidic lab-on-a-chip systems, short LOC, implement a multitude of ocurring processes on the smallest of spaces. Lab on a chip analyze liquids on a compact chip for process analytics of biological, chemical or physical processes. Lab on a chip use the capillary force for transporting a few picoliters or microliters of a fluid. Using dedicated microscope-based surface metrology like the TopMap profilers, allows you for checking for dimensional tolerances of the microfluidic LOC channel, evaluate the lab-on-a-chip channel depth or width with high precision, determine the volume or measure the flatness areally on the entire microship. If parallelism, step height or flatness of the chip lab are not within the very tight tolerances and according to specification, this will affect the performance and reliability of the chip lab analysis.
Characterizing lab-on-a-chip by measuring stepheight, channel depth or flatness
With a large field of view (FoV) and high vertical resolution, the TopMap optical profilers allow straightforward examination of lab-on-a-chip channel depths of geometrical inspection of the entire chip laboratory (lab on a chip, LOC) with just one measurement. The telecentric optical design of the white-light interferometers shows a parallel light beam path, enabling to capture the channel bottom of lab-on-a-chip devices without shadowing effects that cause blind spots on the measurement data. The microscope-based profilers of the TopMap series focus on inspecting microsystems or structural details, roughenss evalatuation and more. Keeping the z-axis resolution constant, TopMap systems quickly and easily adapts the lateral resolution to changing measuring tasks by changing lenses.