Current trends and latest advancements in Vibrometry & MEMS characterization

Welcome to the 1st Summer School of Vibrometry at Northeastern University, a two-day immersive program dedicated to advancing knowledge and hands-on experience in laser Doppler vibrometry (LDV). Hosted by the Institute of NanoSystems Innovation (NanoSI) at Northeastern University (Boston Campus) on August 20–21, this event brings together experts, researchers, and students for indepth technical talks, interactive demonstrations, and collaborative learning. With sessions covering LDV fundamentals, novel on-chip acoustic metrology, advanced MEMS/NEMS applications, and structural dynamics, participants will gain practical insights through hands-on training using state-of-the-art equipment, including single-point, microscopic, scanning, and long-range vibrometers. Join us as we explore the cutting edge of non-contact vibration measurement technology.

The event is free of charge. Limited capacity, registration accepted on a first-come, first-serve basis. Breakfast and lunch will be provided.

Northeastern University
805 Columbus Ave, Room #EXP 610
Boston, MA 02120

Agenda

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 Summer School of Vibrometry Day 1 – Wed, August 20

  • 8:30 AM - 9:00 AM Registration and light breakfast
  • 9:00 AM - 9:10 AM Welcome, Prof. Matteo Rinaldi, the NanoSI Institute, Northeastern University
  • 9:10 AM - 9:15 AM Summer school program and content introduction, Prof. Ben Davaji, Northeastern University
  • 9:15 AM - 10:00 AM Fundamentals of LDV and measurement automation, Arend von der Lieth, Polytec, Inc.
  • 10:00 AM - 10:15 AM Coffee Break
  • 10:15 AM - 11:00 AM Coherent imaging of microwave vibrations in piezoelectric resonators, Dr. Jason Gorman, NIST
  • 11:00 AM - 11:45 PM Ultrasensitive optical detection and visualization of motions in micro/nanomechanical resonators, Prof. Philip Feng, University of Florida
  • 11:45 AM - 1:00 PM Lunch and grouping for hands-on session
  • 1:00 PM - 3:30 PM Live measurement example and hands-on session
    • Single-point laser vibrometer hands-on tutorial
    • Microscopic LDV measurement on a nonlinear micromirror and MEMS comb
    • Scanning Vibrometer for structural dynamics (macroscopic)
  • 3:30 PM - 4:30 PM Northeastern nanofabrication cleanroom and NanoSI institute tours

     

 Summer School of Vibrometry Day 2 – Thurs, August 21

  • 8:30 AM - 9:00 AM Registration and light breakfast
  • 9:00 AM - 9:45 AM Advanced LDV measurements for MEMS applications, Mario Pineda, Polytec, Inc.
  • 9:45 AM - 10:30 AM LDV advanced applications:
    • App1: SLDV supporting the development of an ultrasonic-based antifogging technology, Daniel Ruiz-Cadalso, Worcester Polytechnic Institute & Center for Holographic Studies and Laser micromechaTronics (CHSLT)
    • App2:Full-field measurements for anomaly detection of mechanical systems using convolutional neural networks and LSTM networks, Celso de Cabo, Worcester Polytechnic Institute
    • App3: Characterizing human middle ear dynamics by combined High-Speed 3D-DIC and Laser Doppler Vibrometry, Jonathan Oliveira Luiz, Worcester Polytechnic Institute & CHSLT
  • 10:30 AM - 10:45 AM Coffee Break
  • 10:45 AM - 11:15 AM Lithium niobate integrated microwave acoustics, Prof. Linbo Shao, Virginia Tech
  • 11:15 AM - 11:45 AM Quantitative spectral interferometry: Theory and applications in vibrometry, Prof. Yizheng Zhu, Virginia Tech
  • 11:45 AM - 12:15 PM LDV metrology for integrated acoustic microsystems, Prof. Benyamin Davaji, Northeastern University
  • 12:15 PM - 1:30 PM Lunch and grouping for hands-on session
  • 1:30 PM - 3:30 PM Live measurement example and hands-on session
    • Single-point laser vibrometer hands-on tutorial
    • Microscopic LDV measurement on a nonlinear micromirror and MEMS comb
    • Scanning Vibrometer for structural dynamics (macroscopic)

Guest speakers

Matteo Rinaldi

Matteo Rinaldi is a professor of Electrical and Computer Engineering at Northeatern University and Director of the Institute for Nanosystems Innovation (NanoSI). Matteo Rinaldi received his first-level (B.S.) and second-level (M.Sc.) Laurea degrees in Electronic Engineering (summa cum laude) from the University of Rome Tor Vergata, Rome, Italy, in 2004 and 2007, respectively, and his Ph.D. degree in Electrical and Systems Engineering from the University of Pennsylvania, Philadelphia, in 2010. His research interests primarily include Micro/Nano Electro Mechanical Systems (MEMS/NEMS) devices with particular emphasis on Aluminum Nitride (AlN) piezoelectric NEMS sensors for physical, chemical and biological detection, AlN Radio Frequency MEMS/NEMS devices, micro/nano fabrication techniques and integration of MEMS/NEMS devices with electronics. He has authored more than 20 publications in the aforementioned research areas and also holds 3 device patent applications in the field of micro/nano mechanical resonant devices.

Dr. Jason Gorman

Jason J. Gorman is a Project Leader in the Microsystems and Nanotechnology Division within the Physical Measurement Laboratory at NIST. He received a B.S. in Aerospace Engineering from Boston University, and an M.S. and Ph.D. in Mechanical Engineering from The Pennsylvania State University, where he was supported by a National Science Foundation Graduate Research Traineeship. Jason joined NIST as a staff member after completing a National Research Council Postdoctoral Associateship. His research focuses on micro- and nanomechanical resonators, micro-acoustic devices, cavity optomechanics, and integrated nanophotonics, and their application to sensing, frequency control, nanofabrication and quantum information science.

Philip Feng

Philip Feng is currently a Wally Rhines Endowed Professor in Department of Electrical & Computer Engineering (ECE) and a Graduate Faculty Professor in Department of Physics at University of Florida, Gainesville, FL, USA. He received his Ph.D. in Electrical Engineering from Caltech in 2007.  His group’s research has been primarily focused on device physics and engineering of advanced MEMS/NEMS transducers for information processing in both classical and quantum regimes, by harnessing properties of new materials and coherent signal transduction schemes, especially those in wide/ultrawide-bandgap (WBG/UWBG) materials, 2D materials and heterostructures.  He has graduated 17 Ph.D. students, mentored >12 postdoctoral scholars, and supervised over 16 M.S. students with theses or research projects.  His selected awards or recognitions include the National Aademcy of Engineering (NAE) Grainger Foundation Frontiers of Engineering (FOE) Award, the National Science Foundation (NSF) CAREER Award, the Presidential Early Career Award for Scientists and Engineers (PECASE), and several Best Paper Awards (with his students) at IEEE and other international conferences.  He has served on the international steering committee (ISC) for IEEE MEMS and Transducers conferences, and the executive and/or technical program committees for IEEE IEDM/MEMS/Transducers/IFCS-EFTF.  He was a conference chair for IEEE MEMS 2021.  He has been an organizer and co-chair for the SiC+X Workshop (a forum focused on the frontiers of SiC & related materials, devices, & systems) since 2017. He co-organized and co-chaired the Florida Semiconductor Week 2023, and the Florida Quantum Summit 2025.

Benyamin Davaji

Benyamin Davaji is an assistant professor in the Electrical and Computer Engineering Department at Northeastern University. His main research interests include integrated microsystems, emphasizing sensing and computation using mechanical waves, acoustic/ultrasound transducers, bio-interfaces, microcalorimetry, and implementing data-guided methods for nanofabrication process development and semiconductor manufacturing. He received his Ph.D. degree in Electrical and Computer Engineering from Marquette University in 2016 and held a post-doctoral associate position in Electrical and Computer Engineering at Cornell University. 

Linbo Shao

Linbo Shao is an Assistant Professor in the Bradley Department of Electrical and Computer Engineering and affiliated with Department of Physics at Virginia Tech and a faculty member of Virginia Tech Center for Quantum Information Science and Engineering (VTQ). He received his Ph.D. in Engineering Science in 2019 and M.S. in Applied Physics in 2016 from Harvard University, and B.S. in microelectronics in 2014 from Peking University. His current research interests include lithium niobate integrated acoustic-wave and acousto-optic devices for sensing, computing, and quantum applications. Group website: https://shaogroup.ece.vt.edu/   

Yizheng Zhu

Dr. Yizheng Zhu is an Associate Professor in Electrical and Computer Engineering at Virginia Tech, where he leads projects on optical sensing and imaging. His research focuses on optical interferometry, precision metrology, phase microscopy, and fiber sensors. He received his Ph.D. in Electrical Engineering from Virginia Tech. Prior to rejoining the university, he conducted research in biomedical optics at Duke University. His recent work focuses on the development of high-speed vibrometry systems.

Jonathan Oliveira Luiz

Jonathan Oliveira Luiz is a Ph.D. candidate in Mechanical Engineering at Worcester Polytechnic Institute and a Research Assistant at both the Center for Holographic Studies and Laser micromechatronics (CHSLT) and Mass Eye and Ear. His research focuses on using high-speed optical techniques—including 3D Digital Image Correlation and Laser Doppler Vibrometry—to investigate the mechanical response of the human middle ear under moderate to high sound levels.

Daniel Ruiz-Cadalso

Daniel Ruiz-Cadalso is a Ph.D. candidate in Mechanical & Materials Engineering at Worcester Polytechnic Institute and a Research Assistant at the Center for Holographic Studies and Laser micromechaTronics (CHSLT). His interests include research, development, and implementation of high-resolution optical techniques for industrial applications, focusing on interferometric techniques such as Digital Holographic Interferometry, Laser Shearography, Optical Coherence Tomography (OCT), and Scanning Laser Doppler Vibrometry (SLDV).

Celso de Cabo

Celso T. do Cabo is currently a Ph.D. candidate in Mechanical Engineering at Worcester Polytechnic Institute. He obtained his Master’s degree in mechanical engineering at Worcester Polytechnic Institute in 2023 and his Bachelor’s degree in mechanical engineering at the Universidade Federal de São Carlos in 2017.

Your PolyXpert in Vibrometry