Measuring the Dynamics and Topography of MEMS

Using the versatile surface measurement systems from Polytec, you can complete your micro and nano technology tasks reliably, quickly and with a high level of precision.

You can eject channel depths on your lab-on-a-chip, determine the step height on MEMS packaging, establish how flat pressure sensors are and analyze MEMS using surface parameters.

Even performing dynamic out-of-plane and in-plane measurements on RF filters to determine MHz resonance frequencies will be a simple task for you now – thanks to Polytec’s Micro System Analyzer series.

Brochure Competence Field Surface Metrology

MEMS gear