The MSA-600 is Polytec’s latest system for optical characterization of MEMS. This now includes the capability to measure frequencies up to 2.5 GHz. We are also releasing our MSA-650 IRIS system with IR capability for measuring through silicon on encapsulated devices.
Our instruments feature real-time, high bandwidth response measurements with resolution down to the picometer level. Automated scan measurements provide 3D animations for visualization of complex deflection shapes. We will present several examples where our technology is used in the MEMS research community for device characterization.