Learn how Polytec’s latest technology is used for cutting edge applications in the field of Micro-Electro-Mechanical Structures (MEMS). Our Micro System Analyzer (MSA) combines powerful tools for analysis and visualization of structural vibrations of MEMS. We feature laser Doppler vibrometry for measurement of out-of-plane motion with resolution down to picometers and bandwidth out to GHz. Scanning measurements provides full-field mapping and 3D visualization of deflection shapes.
Our newly released MSA-100-3D system extends our capabilities to 3D measurements in both in-plane and out-of-plane directions for complete 3D motion analysis. We present several real-world application studies where our MSA has been instrumental in the design and development of MEMS.