The high-performance laser Doppler vibrometer delivers fast, real-time response measurement with sub-pm displacement resolution. The integrated stroboscopic video microscope enables the straightforward characterization and live-animation of in-plane motion. And the white-light interferometer option provides millions of 3D surface data in seconds.
Complemented by its straightforward operation and intuitive user interface, the MSA-600 is your powerful optical measurement solution in MEMS R&D and QC.
Further information >
Measuring 3D dynamics and topography of MEMS and microsystems
The MSA-600 Micro System Analyzer is the all-in-one optical measurement workstation for characterizing surface topography as well as in-plane and out-of-plane motions.
