Capturing MEMS’ Vibrations and Topography with a Single Instrument
The MSA-500 Micro System Analyzer is the all-in-one instrument – the only one of its kind in the world – for static and dynamic 3D characterization of MEMS modules and microstructures. By integrating a microscopic lens with scanning laser Doppler vibrometry, stroboscopic video microscopy and white-light interferometry, this micro system analyzer offers you the ideal all-in-one solution that you can use to extensively analyze vibrating microstructures and their topography. You can quickly identify resonance frequencies and have associated deflection shapes and even transient processes visualized in a reliable and clear manner.
Your premium tool for analyzing MEMS and microstructures
In the event of broadband excitation, you can use the highly sensitive laser vibrometer to swiftly identify all the mechanical resonances (in-plane and out-of-plane) in a single pass without the necessity of any prior information about the component. Perform full-field scans of microscopic components and get undistorted measuring results for the structural dynamics (out-of-plane) at bandwidths of up to 24 MHz. Would you like to examine in-plane vibration behaviour more closely? Then all you have to do is simply use stroboscopic video microscopy in a second step to get information about amplitudes and phases.
Compatible with common probe stations, the micro system analyzer helps you in all stages of development – from MEMS prototyping to testing and troubleshooting – and thus helps you to cut production costs and also shorten the time to market. The Polytec MSA-500 Micro System Analyzer was crowned winner of the 2005 Sensor Innovation Award and the Photonics Circle of Excellence for its innovative technology.
Wafer-Level and Single-Die Testing
You use the entry-level device for microscope vibrometry to record vibrations on small components and microsystems with a high degree of precision over the entire surface. The device works contactlessly and therefore measures the dynamics of even small samples...
The 3D Micro System Analyzer records vibration components in all three spatial directions at once. The optical measurement system enables high-resolution 3D vibration analysis with amplitude resolutions in the sub-picometer range, for both in-plane and...
You can use the UHF Ultra High Frequency Vibrometer to analyze out-of-plane vibrations up to 2.4 GHz for comprehensive analysis of transient events in real-time.