Innovative Solutions for MEMS Characterization

Inspired by the rapid further development of microelectromechanical systems –known as MEMS for short – Polytec is presenting an innovative product line of microscope systems that you can use to validate microsystems’ dynamics and topography. At Polytec, you’ll find the perfect devices for determining transfer functions, as well as unique all-in-one instruments for both static and dynamic 3D characterization of microsystems that can be integrated in (vacuum) probe stations.

MSA-050 Micro System Analyzer

You use the entry-level device for microscope vibrometry to record vibrations on small components and microsystems with a high degree of precision over the entire surface. The device works contactlessly and therefore measures the dynamics of even small samples in a completely undistorted way.

MSA-500 Micro System Analyzer

The all-in-one instrument – the only one of its kind in the world – for static and dynamic 3D characterization of MEMS and microstructures. If you combine Polytec’s microscope-based instruments with commercially available probe stations, you can carry out test processes for MEMS at wafer level too.

MSA-100-3D Micro System Analyzer

The 3D Micro System Analyzer records vibration components in all three spatial directions at once. The optical measurement system enables high-resolution 3D vibration analysis with amplitude resolutions in the sub-picometer range, for both in-plane and out-of-plane vibration components.

UHF-120 Ultra High Frequency Vibrometer

You can use the UHF Ultra High Frequency Vibrometer to analyze out-of-plane vibrations up to 2.4 GHz for comprehensive analysis of transient events in real-time.