Laser Doppler vibrometers

Polytec vibration sensors are laser Doppler vibrometers that have become the globally established gold standard for non-contact vibration analysis. The complete product portfolio offers solutions to any vibration measurement task in research, development, production testing and long-term monitoring. Whether single-point or differential measurement, determining rotational vibrations or in-plane motions, visualizing the dynamic behavior of microsystems or full-field structural vibrations: Polytec laser sensors provide a quick, non-contact and non-intrusive measurement solution.

Innovative solutions for MEMS characterization

Inspired by the rapid further development of microelectromechanical systems –known as MEMS for short – Polytec is presenting an innovative product line of microscope systems that you can use to validate microsystems’ dynamics and topography. At Polytec, you’ll find the perfect devices for determining transfer functions, as well as unique all-in-one instruments for both static and dynamic 3D characterization of microsystems that can be integrated in (vacuum) probe stations.

MSA-050 Micro System Analyzer

You use the entry-level device for microscope vibrometry to record vibrations on small components and microsystems with a high degree of precision over the entire surface. The device works contactlessly and therefore measures the dynamics of even small samples in a completely undistorted way.

UHF-120 Ultra High Frequency Vibrometer

You can use the UHF Ultra High Frequency Vibrometer to analyze out-of-plane vibrations up to 2.4 GHz for comprehensive analysis of transient events in real-time.

MSA-600 Micro System Analyzer

The all-in-one optical measurement solution for static and dynamic 3D characterization of MEMS and microstructures. The MSA-600 advances development and QC processes - and integrated into commercially available probe stations it even allows testing on wafer-level.

MSA-100-3D Micro System Analyzer

The 3D Micro System Analyzer records vibration components in all three spatial directions at once. The optical measurement system enables high-resolution 3D vibration analysis with amplitude resolutions in the sub-picometer range, for both in-plane and out-of-plane vibration components.