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Measure with greater precision using white-light interferometers
The “optical wafer thickness gauges” are based on the white-light interferometer principle and measure the thickness of wafers and other transparent materials.
TM5300 Table-Top Device
- Suitable for wafers measuring up to 150 mm in diameter
- Layer thickness range: 50 µm – 2 mm
- Measured variables: Thickness, bow, warp, TTV, LTV, mechanical tension
- No calibration necessary
- High level of accuracy and repeatability
- High-speed measurements
TM5000 In-Line Device
- Layer thickness range: 50 µm – 2 mm (a 10 mm variant is available)
- No calibration necessary
- Multi-channel (1, 2, 4, etc.)
- Also available as an in-line version
- Contactless measurement method
- High level of accuracy and repeatability