Laser-Doppler-Vibrometry (LDV) is a well-established technique to study the mechanical dynamics of MEMS. Recent state-of-the-art advancements in technology now extend the measurement capability even to encapsulated MEMS allowing to measure and visualize the device operation in its final state under real conditions without specialied preparation. Thus the effect of the capping step in the fabrication process can be directly studied, allowing to detect the effect of capping induced additional stresses which may alter the device performance.
Polytec’s new, patented state-of-the-art IR interferometer technology enables supreme data quality due to superior separation of individual device layers in the capped device.
- Concept and theory of laser Doppler vibrometry
- The new IRIS short coherent IR vibrometer
- Applications examples from MEMS R&D and QC