整个区域小部件的振动测量
Polytec 的 MSA-050显微系统分析仪，高精度测量小型部件和微系统整个表面的振动特性。该设备工作时采用非接触式，以完全无失真的方式测量甚至小样品的结构动力学。Polytec 扫描式激光测振仪软件久经考验，且不断优化，仪器操作更加便捷，测量结果可用清晰的动画效果显示出来。
亮点
- 高分辨率振动分析；带宽高达 2 MHz
- 非接触式快速测量
- PSV 软件久经考验，操作简单
- 测量结果以动画显示
进入基于显微镜的振动测量
显微系统分析仪由带手动 z 向调节的紧凑式工作台和数字式单点式激光测振仪组成。MSA-050 配备了一个电动 xy 工作台，通过软件移动样品，完成全场扫描式振动测量。为节省空间，所有电子器件均放置在19”机箱内。
配件和组件
Optical accessories
Digital Displacement Decoder
Optional vibrometer decoder delivering high resolution displacement signals
VIB-A-10xLENS 10x Microscope Lens
Providing a laser spot diameter of 3 μm at 37.3 mm stand-off distance.
VIB-A-20xLENS 20x Microscope Lens
Providing a laser spot diameter of 1.5 μm at 21.7 mm stand-off distance.
VIB-A-510 Illumination Module
LED light source providing a coaxial illumination of the test object. Highly recommended for use with the VIB-A-10xLENS / VIB-A-20xLENS Microscope Lenses.
Miscellaneous
A-JST-0001
Joystick for convenient manual control of the xy-positioning stage.
相关产品
MSA-650 IRIS Micro System Analyzer
The innovative and patented MSA-650 IRIS Micro System Analyzer with IR capability allows for measuring true MEMS dynamics by characterizing both in-plane and out-of-plane motions through silicon encapsulation without contact, without need for preparing nor decapping the device.
MSA-600显微式激光测振仪
MSA-600显微式激光测振仪专用于测量MEMS和显微结构，是获取三维静态特性与动态特性的一体化光学测量解决方案，其有助于加快产品开发进程，优化产品质量控制，甚至可集成至商用探针台上进行晶圆级测试。现在高达 2.5 GHz。
MSA-100-3D显微式激光测振仪
显微系统分析仪同时记录所有三个空间方向上的振动分量，能高分辨率进行面内和面外3D振动分析，其振幅分辨率在亚皮米范围内。
PSV Software
The PSV Software is the heart of every Polytec full-field vibration measurement system. This comprehensive software package allows the fast and simple acquisition, display and editing of vibration measurement data gathered with all PSV Scanning Vibrometers, the MSA Micro System Analyzer series for microscopic observations or the automated structural test station RoboVib®.