Measuring 3D dynamics and topography of MEMS and microsystems

The MSA-600 Micro System Analyzer is the all-in-one optical measurement workstation for characterizing surface topography as well as in-plane and out-of-plane motions.

The high-performance laser Doppler vibrometer delivers fast, real-time response measurement with sub-pm displacement resolution. The integrated stroboscopic video microscope enables the straightforward characterization and live-animation of in-plane motion. And the white-light interferometer option provides millions of 3D surface data in seconds.

Complemented by its straightforward operation and intuitive user interface, the MSA-600 is your powerful optical measurement solution in MEMS R&D and QC.

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MSA-600 base-stand