MEMS压力传感器
MEMS 压力传感器是首批批量生产的微型机电设备(MEMS)之一,种类繁多。压力传感器应用广泛,如医疗和生物医学用途、隔膜、可穿戴设备、诊断成像和汽车。使用非接触式光学轮廓分析仪对 MEMS 压力传感器的表面形貌进行 2D/3D 等距轮廓分析,可用于静态形貌表征、形状参数评估、质量控制中的公差检查以及制造过程的实时反馈(过程控制)。
纹理
表面纹理或光洁度定义了工件的粗糙度、波浪度和平面参数。精密表面的特定三维纹理会影响其外观、摩擦力、耐腐蚀性等。根据 ISO 4287、ISO 25178 或新的由三部分组成的 ISO 21920 标准,TopMap 表面轮廓仪可在数秒内获取数百万个数据点进行区域评估。
TopMap Micro.View(+)
Micro.View® and its bigger brother Micro.View®+ are the next generation optical surface profilers. Focus Finder and Focus Tracker greatly enhance the ease of use. Their CST Continuous Scanning Technology allows for using the entire 100mm travel range as measurement range. Distinguish and document defects or visual distortions with the Color Information mode. Quantify surface topography with sub-nm resolution and reliably characterize your precision mechanics, sealing surfaces, MEMS or microstructures and structural details with excellent vertical resolution independent of the objective magnification.