TMS-1200 TopMap μLab - Features

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• Rapid, non-contact 3-D topography measurement with sub-nanometer resolution
• Determination of structure heights and shape on both rough and specular surfaces
• Smart Surface Scan technique copes with different contrast levels
• Powerful TMS software for topography and surface characterization
• 2-D and 3-D presentation with video overlay
• Optional stitching for extending the field-of-view

The TopMap µ.Lab is a complete white-light interferometric measurement microscope workstation for micro-topography measurement on almost any surface. The system is well suited to product development and off-line quality control measurements.

A special objective lens generates an interference pattern of the test sample. This interference pattern is imaged into a digital camera. By scanning the interference objective with nanometer precision, a series of interference patterns are generated and then recorded by the camera. The result is an X-Y-Z topography measurement of the test object with high spatial resolution and precise Z values.

The powerful analysis software uses the data set to determine shape, curvature, flatness and roughness. The user can process the data using envelope or phase evaluation, as well as various filtering and masking techniques. For enhanced capabilities, a report software package is available.

Objects larger than the optical field-of-view can be measured by translating the object and stitching the topography measurements. This enhancement is available with translation shifts of 50 mm in both the X and Y directions. The total surface is then assembled from the individual measurements by the TMS software, allowing significantly larger measurement areas.