Microstructure Measurement Training

Polytec, Inc. Headquarters

Tustin, CA, 6/5/2008 - 6/6/2008

1342 Bell Ave, Ste 3-A

Agenda:

Thursday, June 5:    Out-of-plane dynamic MEMS analysis using laser Doppler vibrometry

Friday, June 6:         In-plane dynamic MEMS analysis using stroboscopic video microscopy and Topography measurements using white light interferometry

 

This two-day training course provides hands-on, intermediate level training in the use of Polytec’s MSA-500 Micro System Analyzer. The attendees will improve their ability to take accurate data for MEMS dynamic analysis and to measure static chip topography. In addition to reviewing basic theory, hardware and software operation, recent enhancements are also presented such as the latest software and hardware changes.  All course participants will train on the latest MSA-500 equipment in Polytec's test and measurement laboratory.  The course will help refine the participant’s ability to use the software/hardware to acquire data, to export the data and to do basic analysis within the MSA software. Participants are encouraged to bring a MEMS device of their own (please call to make arrangements). Time will be made available to test these devices towards the end of each day.

 

Training Course Agenda

 

Course Objectives:

  1. To review the fundamentals of vibration measurement and analysis
  2. To learn the physics behind laser Doppler vibrometry, stroboscopic video microscopy, and scanning white light interferometry
  3. To review Micro System Analyzer system terminology, principles of operation and data display options
  4. To individually perform accurate in-plane, out-of-plane and topography measurements on real MEMS structures (MEMS mirrors, RF switches and more)
  5. To learn how to set excitation and measurement parameters to achieve the best test results.

 

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Course Price

Complete two-day seminar, $940

Student rate for two-day seminar, $625

One-day rate, $625

 

Course Size Limit: 10

Breakfast (7:00 AM) and Lunch (12:00 PM)

All meals and materials are included in the Course price.

 

 

To register for the Training Course or to receive additional information please call Pam Cravenor at (714) 352-0480