MSA-100-3D Micro System Analyzer


3D Vibration Measurements for Microsystems

The MSA-100-3D Micro System Analyzer is designed for 3D vibration analysis with high lateral resolution. It is especially suited for microsystems, precision mechanics parts and for studies on the dynamics of HGAs and secondary actuators in the data storage industry.

The instrument is based on a novel 3D vibrometer setup enabling pm-resolution for both out-of-plane and in-plane motion. It has a frequency bandwidth of 25 MHz. An integrated XY-traverse stage with full software support for high-precision sample movement enables scanned measurements for obtaining 3D deflection shapes.

The optional integrated XY positioning table together with the sophisticated software enables an easy handling of the probe.

  • Real-time measurement with high bandwidth up to 25 MHz
  • Sub-pm displacement resolution for both Out-of-Plane and In-Plane motion
  • Single-Point and Full-Field scanning measurements
  • Small spot size of <4 μm for high lateral resolution
  • Large stand-off distance of 38 mm
  • Probe station compatible