MSA-100-3D Micro System Analyzer

3-D Vibration Measurements Now Available for Microsystems

The new MSA-100-3D Micro System Analyzer is designed for 3-D vibration analysis with high lateral resolution especially for microsystems, precision mechanics parts and for studies on the dynamics of HGAs and secondary actuators in the data storage industry. The instrument is based on a novel 3-D vibrometer setup enabling pm-resolution for both out-of-plane and in-plane motion with a frequency bandwidth of 25 MHz. An integrated XY-traverse stage with full software support for high-precision sample movement enables scanned measurements for obtaining 3-D deflection shapes.

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