Hardware | TMS-E-015 Controller | TMS-I-300 Interferometer |
Dimensions [L x W x H] | 240 mm x 140 mm x 420 mm | 376 mm x 199 mm x 112.5 mm |
Weight | 5.5 kg | ~10 kg |
Power | 100 ... 240 VAC ±10 %, 50/60 Hz; max. 30 W |
Operating temperature | +5 °C ... +40 °C (41 °F ... 104 °F) |
Storage temperature | -10 °C ... +65 °C (14 °F ... 149 °F) |
Relative humidity | max. 80 %, non-condensing |
Laser safety | IEC/EN 60825-1: 2003-10 (CFR 1040.10, CFR 1040.11) |
Electrical safety | IEC/EN 61010-1: 2002-08; EMC: IEC/EN 61326: 2006-10 |
Scope of delivery | Interferometer, controller, industrial PC with TFT monitor, connection cable, 1 reference filter, TMS software with hardlock (dongle), dryer cartridge |
Optional accessories | More reference filters, λ/20 plate, calibration kit, basic tripod, tripod, sample positioner, complete workstation |
Optics |
Measurement method | Scanning white-light interferometry |
Imaging system | Telecentric |
Light source | White-light LED |
Camera | CCD camera, 656 x 491 Pixels (H x V) |
Vertical dynamic range | 500 µm |
Lateral resolution |
Model | Field-of-view | Pixel resolution |
TMS-300-204 | 5.8 mm x 4.3 mm | 9 µm |
TMS-300-206 | 8.7 mm x 6.5 mm | 13 µm |
TMS-300-210 | 13.0 mm x 9.7 mm | 20 µm |
TMS-300-214 | 18.6 mm x 13.9 mm | 29 µm |
TMS-300-219 | Ø19.4 mm | 39 µm |
Z-performance parameters1) |
Sampling increment 2) | Nominal sampling increment | Fast sampling |
Evaluation procedure | Smooth surfaces3) | Rough surfaces4) | Smooth surfaces3) | Rough surfaces4) |
Resolution, average of 50 (rms) | < 0.55 nm | < 4 nm | < 0.6 nm | < 4.3 nm |
Resolution, single meas. (rms) | 1.1 nm | 8.0 nm | 1.2 nm | 8.6 nm |
1) Empirically measured, typical specification parameters for the Z-performance of the TMS-300. Measuring on a flat mirror (95 % of the maximum measuring field, interference contrast ≈ 1).
2) Nominal sampling increment: correlogram sampling according to Nyquist. Fast sampling: correlogram sampling according to sub-Nyquist. Difference in measuring time is a factor of 2.
3) Evaluation of the correlogram phase.
4) Evaluation of the correlogram envelope.
Representative flatness measurement results1) |
Sampling increment 2) | Nominal sampling increment | Fast sampling |
Evaluation procedure | Smooth surfaces3) | Rough surfaces4) | Smooth surfaces3) | Rough surfaces4) |
Average flatness deviation | 10 nm | 65 nm | 12.5 nm | 75 nm |
Repeatability of a flatness measurement | 0.75 nm | 3.5 nm | 1.25 nm | 5.5 nm |
1) Rounded values derived by empirical measurement data and a statistical evaluation of the measured flatness for several TMS-300 at different sample increments and for both correlogram evaluation procedures. Measurements on a plane mirror (95 % of the maximum field of view used, interference contrast ≈ 1).
2) Nominal sampling increment: correlogram sampling according to Nyquist. Fast sampling: correlogram sampling according to sub-Nyquist. Difference in measuring time is a factor of 2.
3) Evaluation of the correlogram phase.
4) Evaluation of the correlogram envelope.
Representative step height measurements on a calibrated depth setting standard 1) |
Nominal groove depth | µm | 5 | 20 | 50 | 200 | 450 |
Repeatability 2) (Standard deviation) | µm | 0.009 | 0.008 | 0.010 | 0.009 | 0.034 |
Relative repeatability | % | 0.02 | 0.04 | 0.02 | 0.005 | 0.008 |
Reproducibility 3) (Standard deviation) | µm | 0.020 | 0.015 | 0.035 | 0.030 | 0.065 |
Relative reproducibility | % | 0.40 | 0.08 | 0.07 | 0.02 | 0.01 |
Expanded measurement uncertainty 4) | µm | 0.09 | 0.10 | 0.145 | 0.20 | 0.290 |
Relative expanded measurement uncertainty | % | 1.8 | 0.50 | 0.3 | 0.1 | 0.06 |
1) Empirically determined representative performance for measurements on a calibrated PTB depth setting standard type A1 (ISO 5436-1), sample increment “Nominal” or “Fast Sampling”.
2) Variation of the measurement values for a series of measurements under repeatability conditions, averaged for several measurement devices.
3) Variation of the measured deviation on every step for a series of measurements under reproducible conditions with several measurement devices.
4) Margin of the confidence interval with a probability of 99.7 % (3σ), determined by the standard deviation from the calibrated value of a single step (several devices under reproducibility conditions).
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