Microsystem & MEMS Analyzers

Microsystem & MEMS Analyzers

Inspired by the need to characterize the dynamics of the growing variety of micro-electromechanical systems (MEMS), Polytec has developed an innovative line of microscope-based systems to measure the dynamics and topography of microsystems and MEMS devices. The MSA-500 Micro System Analyzer is the premier measurement tool for the analysis and visualization of structural vibrations and surface topography in microstructures. For wafer-level testing, most systems can easily be mounted onto manual or automated probe stations.

"The Polytec LDV in our laboratory was instrumental in characterizing the MEMS-based energy harvesters produced through my Ph.D. research. Understanding the frequency response of these harvesters is of the utmost importance to ensure proper operation. The Polytec LDV allowed for accurate, real time measurement of the frequency response of the harvesters facilitating the further development of our energy harvesting technologies. The training and service provided from the Polytec Support Team was excellent, allowing myself and my labmates to excel at our experiments using the LDV."
Jonathan Lueke, Postdoctoral Fellow, Advanced MEMS/NEMS Design Laboratory, Mechanical Engineering Department, University of Alberta

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