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タイトルファイルサイズ内容

MEMS Model Validation 720 kB Application Note VIB-M-06: Laser Vibrometry Helps to Improve Microstructure Simulations

MEMS Geometry & Vibrations 544 kB Application Note VIB-M-05: Measuring 3-D Geometry and Vibrations on a MEMS Comb Drive

Semiautomatic MEMS Test 363 kB Application Note VIB-M-04: Semiautomatic, Wafer-Level Measurements of MEMS Dynamics

{GUID: 9808726DEDB04EDBA678ED93EA6F015F} 40 KB Document information

MEMS Dynamic Analysis 388 kB Application Note VIB-M-03: Sensing Picogram Masses - Laser Vibrometry Leads to Breakthroughs in MEMS Dynamic Analysis

Microstructures 433 kB 3-D Vibration and Motion Analysis of Microstructures

MEMS Cantilever 1046 kB Application Note VIB-M-02: Identification and Characterization of the 3-Dimensional Vibration Behavior of a MEMS Cantilever Structure

Probe Stations 534 kB MEMS Workstations: Micro-Motion Analysis, Assemble, Test and Repair (from LM INFO Special Issue 1/2005)

Sensor Reliability 395 kB Characterizing the Thermomechanical properties of Sensors Using Laser Vibrometry (from LM INFO Special Issue 1/2005)

Molecular Motors 368 kB Laser Doppler Vibrometry Brings Insight into the Functioning of Fruit Fly Ears (from LM INFO Special Issue 1/2005)

Vibrating Surfaces Made Audible 223 kB Laser Vibrometry as an Indispensable Tool in MEMS Development (from LM INFO Special Issue 2/2004)

MEMS Mirrors 221 kB Measurements at Applied MEMS using Polytec's Microscope Scanning Vibrometer (from LM INFO Special Issue 1/2003)