TMS-1200 TopMap μ.Lab - Tech. Data
Specifications
| Hardware |
Controller |
Measurement Microscope |
| Dimensions [L x W x H] |
244 mm x 108 mm x 50 mm |
452 mm x 265 mm x 194 mm(1) |
| Weight |
0.9 kg |
10.4 kg(1) |
| Power |
100 ... 240 VAC ±10 %, 50/60 Hz; max. 30W |
| Operating temperature |
+5 °C ... +40 °C (41 °F ... 104 °F) |
| Storage temperature |
-10 °C ... +65 °C (14 °F ... 149 °F) |
| Relative humidity |
max. 80 %, non-condensing |
(1) Without objectives and focus block
| Optics |
| Measurement method |
Scanning White Light Interferometry (Michelson/Mirau objectives) |
| Light source |
Long-lifetime LED, 525 nm wavelength |
| Camera |
Progressive scan CCD camera, 1392 (H) x 1040 (V) pixels |
| Piezo travel range |
Max. 250 µm |
Objectives
|
Zoom factor
x-factor |
Numeric aperture NA |
Field-of-view
mm x mm |
Stand-off
distance mm |
Pixel resolution
µm |
| Mirau (Nikon CF Plan) interference objective |
10
|
0.30
|
0.90 x 0.67
|
7.40
|
0.65
|
| Optional Michelson objectives (Nikon CF Plan) |
2.5 |
0.075 |
3.59 x 2.68 |
10.30 |
2.58 |
|
5 |
0.13 |
1.80 x 1.34 |
9.30 |
1.29 |
| Optional Mirau objectives |
20 |
0.40 |
0.449 x 0.335 |
4.70 |
0.323 |
|
50 |
0.55 |
0.180 x 0.134 |
3.70 |
0.129 |
Michelson objective
(Polytec Achro MI LD) |
4
|
0.1
|
2.24 x 1.68
|
>30
|
1.61
|
| Measurement Performance |
| Sampling increment |
10 nm |
87 nm |
| Evaluation procedure(1) |
Smooth surface |
Rough surface |
Smooth surface |
Rough surface |
| Resolution (RMS)(2) |
35 pm |
350 pm |
45 pm |
1.2 nm |
| Resolutionsingle (RMS) |
195 pm |
3.65 nm |
300 pm |
14 nm |
| Repeatability(3) |
250 pm |
2.5 nm |
500 pm |
20 nm |
| Average flatness deviation(4) |
550 pm |
7.5 nm |
2 nm |
50 nm |
| Measurement performance on a traceable calibrated standard (PTB Type A1 (ISO 5436-1) |
| Repeatability(5) |
0.07 % |
| Expanded uncertainty of measurement(6) |
0.50 % |
| Measurement time |
Measurement time = (Z range + 6 μm)/(sampling increment x frame rate) |
| - Examples(7) |
~1.2 min (10 nm sampling increment) |
~8 s (130 nm sampling increment) |
(1) "Smooth surface": Evaluation of the correlogram phase. "Rough surface": Evaluation of the correlogram envelope
(2) Roots mean square (RMS) of the signal amplitude at an averaging number of 50 measurements on a silver coated, parallel aligned plane mirror, measured under vibration-damped, temperature controlled conditions. Values for Resolutionsingle correspond to single measurements
(3) Standard deviation of the measured flatness in a series of 100 measurements on a parallel plate (l/20) slightly tilted
(4) Mean value of the flatness (according to ISO 1101), see(3)
(5) RMS deviation of 30 step height measurements, referred to a calibrated step height of nominal 50 μm
(6) 3x combined standard uncertainty + deviation of the nominal value at 30 consecutive measurements under repeating conditions. The combined standard uncertainty is the quadratic mean out of the uncertainty of the normal and the standard deviation of the measurement values.
(7) Conditions: Z range 15 μm, frame rate 30/s, without averaging
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