TMS-300/320 TopMap In.Line - Tech. Data
Specifications
| TMS-300/320 TopMap In.Line – Hardware |
| Interferometer type |
Michelson |
| Imaging system |
telecentric |
| Field-of-View (depending on configuration) |
4.2 mm x 5.6 mm, 6.4 mm x 8.6 mm, 9.6 mm x 12.8 mm, 13.6 mm x 18.3 mm, Ø 19 mm |
| Version |
TMS-300 |
TMS-320 |
| Vertical dynamic range |
500 μm |
50 mm |
| Vertical resolution |
< 40 nm |
1 μm (10 nm)* |
| Lateral resolution |
9 μm ... 39 μm (depending on the field-of-view) |
| Camera resolution, H x V |
658 x 494 pixels |
| Dimensions [L x W x H] |
380 mm x 200 mm x 120 mm (15 in x 7.9 in x 4.7 in) |
| Power |
Universal Power Supply 100 V ... 240 V |
| Weight |
~ 9.5 kg (~ 21 lbs) |
| Operating temperature |
+5 °C ... +35 °C (41 °F … 95 °F) |
| Storage temperature |
–10 °C ... +65 °C (14 °F … 149 °F) |
| Relative humidity |
max. 80%, non-condensing |
* with optional high-precision Z resolution
| TMS Software |
| User interface and data analysis |
| Supports alignment of test sample via live video |
| Can be automated via COM/ActiveX interface by Polytec or LabView™ driver |
| Macro programming in Visual Basic® |
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TopMap In.Line
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