|
Planar Motion Analyzer PMA-400 in-plane motion measurement system |
|
System output |
Displacement data
Bode diagrams
Step-response plots
Ring-down plots |
|
Frequency range |
0.001 Hz to 1 MHz |
|
Resolution /max. amplitude |
Displacement resolution |
Peak-to peak motion amplitude (in plane) |
|
5x microscope magnification |
26.8 |
nm |
840 |
µm |
|
10x microscope magnification |
13.5 |
nm |
420 |
µm |
|
20 x microscope magnification |
6.7 |
nm |
210 |
µm |
|
40 x microscope magnification |
3.4 |
nm |
105 |
µm |
|
50x microscope magnification |
2.7 |
nm |
85 |
µm |
|
100 x microscope magnification |
1.3 |
nm |
40 |
µm |
|
Strobe exposure time
(time resolution) |
50 ns |
|
Max. strobe jitter |
± 25ns |
|
Precision of phase @1kHz |
0.2mrad / 0.01° |
|
Precision of phase @100kHz |
0.02rad / 1.1° |
|
Precision of phase @1MHz |
0.2rad / 11.5° |
|
Maximum velocity |
> 0.1 m/s to 10 m/s (magnification dependent) |
|
Maximum allowed tilt |
± 21° (magnification dependent) |
|
Maximum allowed piston displacement (out-of-plane) |
50µm (magnification dependent) |
