| Document |
Filesize |
Description |
|
MEMS Testing at NPL
|
753 kB |
Application Note VIB-M-07: An Environmental Chamber Integrated with a Polytec MSA-400 Micro-Scanning Laser Doppler Vibrometer for Use in Characterizing MEMS Devices |
|
MEMS Model Validation
|
720 kB |
Application Note VIB-M-06: Laser Vibrometry Helps to Improve Microstructure Simulations |
|
MEMS Geometry & Vibrations
|
544 kB |
Application Note VIB-M-05: Measuring 3-D Geometry and Vibrations on a MEMS Comb Drive |
|
Semiautomatic MEMS Test
|
363 kB |
Application Note VIB-M-04: Semiautomatic, Wafer-Level Measurements of MEMS Dynamics |
|
MEMS Mass Sensor
|
388 kB |
Application Note VIB-M-03: Sensing Picogram Masses - Laser Vibrometry Leads to Breakthroughs in MEMS Dynamic Analysis |
|
Microstructures
|
433 kB |
3-D Vibration and Motion Analysis of Microstructures |
|
Cantilever Behavior
|
1046 kB |
Application Note VIB-M-02: Identification and Characterization of the 3-Dimensional Vibration Behavior of a MEMS Cantilever Structure |
|
Probe Stations
|
534 kB |
MEMS Workstations: Micro-Motion Analysis, Assemble, Test and Repair (from LM INFO Special Issue 1/2005) |
|
Sensor Reliability
|
395 kB |
Characterizing the Thermomechanical properties of Sensors Using Laser Vibrometry (from LM INFO Special Issue 1/2005) |
|
Molecular Motors
|
368 kB |
Laser Doppler Vibrometry Brings Insight into the Functioning of Fruit Fly Ears (Article by W. Göpfert, LM INFO Special Issue 1/2005) |
|
Automotive Sensors
|
223 kB |
Laser Vibrometry as an Indispensable Tool in MEMS Development (from LM INFO Special Issue 2/2004) |
|
MEMS Mirrors
|
221 kB |
Measurements at Applied MEMS using Polytec's Microscope Scanning Vibrometer (from LM INFO Special Issue 1/2003) |
