MEMS & Microstructures

News

New Demo Video
Charakterization of Micro Structures

PAR-TEST Project: research to determine MEMS parameters in early production stages

MEMS Testing now Semiautomatic

As exotic as microsystems technology appeared to be a few years ago, it has now rapidly become indispensable in many products.

Examples of established applications of MEMS technology are automobile technology, entertainment electronics and telecommunication.

On the basis of its well-trusted knowledge in the area of non-contact vibration measurement technology, Polytec offers a series of products for characterizing the structural dynamics of MEMS components.

Applications

VIB-M-07: Vacuum Measurements at UK NPL

Automotive MEMS Development

MEMS Geometry & Vibrations

Validation of MEMS Models

>>> More Application Notes

Products

MSA-500 Micro System Analyzer

MSV-400 Micro Scanning Vibrometer

PMA-400 Planar Motion Analyzer

MSV-050/100 Microscope Adapter

Links

MEMUNITY - Innovative MEMS Test Solutions

Polytec Tutorial Series:
3-D Vibration and Motion Analysis of Microstructures

LM INFO Special Issue 1/2005: Dynamic Measurements on Microstructures

 

MSA-500 Micro System Analyzer

The MSA-500 Micro System Analyzer is a powerful new all-in-one measurement workstation for precise 3-D dynamic characterization of MEMS and MOEMS microstructures.   

  • Characterize out-of-plane vibrations by Scanning Laser-Doppler Vibrometry

  • Measure in-plane motion and vibration by Stroboscopic Video Microscopy

  • Determine surface topography by White Light Interferometry

  • Test wafers and individual die by combining Polytec’s MSA-500 with a MEMS probe station

 Features | Techn. Data | Applications | Download |
MSA-400 Micro System Analyzer
MSA-500 Micro System Analyzer

MSV-400 Microscope Scanning Vibrometer

The MSV-400 features full-field characterization of out of-plane motion of any kind of microstructures.

  • Large 20 MHz bandwidth and small laser spot size of ³ 1 µm

  • Fast-Scan mode allows data-acquisition at a rate of 100 measurements per second and with picometer resolution

  • Can be integrated in a MEMS probe station for wafer-level testing


 Features | Technical Data | Applications | Datasheet |
MSV-400 Microscope Scanning Vibrometer

PMA-400 Planar Motion Analyzer

The Planar Motion Analyzer is designed for in-plane microstructure vibration and motion analysis.

  • In-plane measurements of microscopic structures such as MEMS actuators require specialized techniques

  • The PMA-400 features in-plane motion analysis using specialized specialized stroboscopic video microscopy


 Features | Technical Data | Datasheet |
PMA-400 Planar Motion Analyzer

MSV-050/100 Microscope Adapter

The bridge that connects Laser Doppler Vibrometry (LDV) to the micro world of MEMS, designed to couple a fiber-optic vibrometer head to a microscope.

  • precise single-point and differential vibration analysis on microscopic structures

  • Optional, video-enabled steering of the laser beam with high spatial resolution

  • Modular design easily upgrades to the MSV-400 Microscope Scanning Vibrometer


 Features | Technical Data | Accessories | Datasheet |
MSV-050/100 Microscope Adapter



Polytec GmbH • Polytec-Platz 1-7 • 76337 Waldbronn •  Germany
Tel.: +49 (0) 7243 604-0 • Fax: +49 (0) 7243 69944 • Postfach 161
http://www.polytec.de • info@polytec.de