MSV-050/100 Microscope Adapter - Features

Measuring Microstructure Vibrations

Polytec’s MSV-050 and MSV-100 Microscope Adapters are the bridge that connects Laser-Doppler Vibrometry (LDV) to the micro world. Designed to couple a fiber-optic vibrometer head to a microscope, the adapters permit precise single-point and differential vibration analysis on MEMS and other microscopic structures. Optional, video-enabled steering of the laser beam has high spatial resolution.

    
Microscope Vibrometry

Laser Doppler Vibrometry is the only proven technique for instantaneous broad-band, out-of-plane vibration analysis. LDV works with almost any excitation waveform (periodic, random or transient) and provides detailed information on responses in time and frequency domains. Options including picometer resolution and 20 MHz bandwidth open the door to the most sophisticated, high-end research on microstructures. LDV is also the answer for measuring non-linearities, transient events and step-response analysis in the microstructure world.

Polytec's MSV-050 and MSV-100 Microscope Adapters are designed to couple a fiber-optic vibrometer head to a microscope to permit precise single-point and differential vibration analysis on MEMS and other microscopic structures. The modular design easily upgrades to the MSV-400 Microscope Scanning Vibrometer.

    
A Modular System

The basic component of the MSV is model OFV-072 Beam Splitter and Microscope Adapter. In the MSV-050 an OFV-071 Manual Beam Positioner connects to the OFV-072 whereas in the MSV-100 a remote controlled beam positioner model OFV-073 Scan Unit with piezo actuators is utilized. The different setups are shown in the drawings on the right page. The MSV-100 already includes a high-end progressive scan video camera, the MSV-050 is equipped with a CCD port for optionally available video cameras. If no video image and no differential capability are needed, the OFV-071 Manual Beam Positioner can be connected directly to the microscope’s CCD port with OFV-071-A C-Mount Adapter.

MSV-100 Remote Controlled Microscope Adapter

    
Key Features and Benefits

  • Interfaces Polytec Laser Doppler Vibrometers to the optics of a microscope
  • Precise measurements on microstructures, with microscope laser spot size
  • High resolution video imaging
  • Frequency range of out-of-plane motions from 0 Hz upt to 20 MHz
  • Optional differential setup measures relative motions and compensates for common path disturbances
  • Integrated viewing and control software for MSV-100 (optional)
  • Can be upgraded to the automated MSV-400 Microscope Scanning Vibrometer

    
Simple Operation

The MSV-100 quickly joins a CCD-port equipped microscope with an LDV fiber-optic sensor head. The laser beam from the sensor head is coupled into the optical path of the microscope and the return light from the microstructure is coupled back into the sensor head for heterodyne demodulation.
A simple adjustment of the MSV-Z-040 scanner controller accurately positions the laser beam on the microstructure through the use of ultra-precise piezo stages. Confirmation of proper positioning comes from a live video camera image of the location of the laser beam on the structure.

    


MSV-050




MSA-E-400 Junction Box




MSV-100