MSV-400 Microscope Scanning Vibrometer - Technical Data

The MSV-400 Microscope Scanning Vibrometer is the successor of the well established MSV-300. A large 20 MHz bandwidth and the small laser spot size of »1 µm enable the vibrational analysis of a large variety of MEMS. The MSV can be even employed for wafer-level testing if the MSV microscope is integrated in a MEMS probe station. Combination with Polytec's PMA-400 Planar Motion Analyzer emphasizes the MSV's capabilities to complete three dimensional motion analysis (refer to Polytec MMA-400 Micro Motion Analyzer).

MSV-400 System Configurations

MSV-400-M2	Standard Configuration, Bandwidth 1 MHz, 2 MHz optional
MSV-400-M2-20 (A)	HF Configuration with high frequency velocity decoder, Bandwidth 10 MHz
MSV-400-M2-20 (B)	HF Configuration with high frequency displacement decoder, Bandwidth 20 MHz

MSV-100 Microscope Scan Unit

Optical sensor head	Standard: OFV-551 single-fiber (see separate datasheet) Optional: OFV-552 dual-fiber with reference mirror
Laser safety class	<1 mW visible output (Class 2)
Beam diameter	10 µm with 4x microscope lens ~ 1 µm with 40x microscope lens
Scanners	Closed loop, dual-piezo scan stage
Scanner resolution	> 200 x 200 points within field of view
Video camera	digital progressive scan camera (1.3 Mpixel) with FireWire interface (IEEE 1394)
Viewing field	Approx. 2.5 mm x 1.75 mm with 4x lens Approx. 100 µm x 70 µm with 100x lens
Scan field	1.75 x 1.75 mm with 4x lens 70 x 70 mm with 100x lens
Connection to microscope	Via CCD port (C-mount)
Recommended Microscopes	Mitutoyo FS70 Series Zeiss Axioskop 2Mat Series Olympus BX2M Series Leica DMLM Series Please ask your Polytec representative for further recommendations

OFV-5000 Vibrometer Controller

Decoder configuration	MSV-400-M2		MSV-400-M2-20 (A)		MSV-400-M2-20 (B)
	VD-02  Wide-bandwidth  velocity decoder VD-06  High Precision  digital velocity  decoder		VD-02  Wide-bandwidth  velocity decoder VD-05  10 MHz velocity  decoder		VD-02  Wide-bandwidth  velocity decoder DD-300  20 MHz  displacement  decoder
	Please see decoder datasheets for details
Velocity resolution	down to 0.02 µm s-1 ÖHz, range and frequency dependent			down to 0.15 µm s-1 ÖHz, range and frequency dependent
Displacement resolution	< 0.1 pm/ÖHz at 100 % reflectivity (MSV-400-M2 with PSV-S-VDD , MSV-400-M2-20 (B))
Max. vibration frequency	1.5 MHz (2 MHz with PSV-S-VDD option)	10 MHz				20 MHz
Max. vibration peak velocity	± 10 m/s
Remote control	Via RS-232 interface

MSA-E-400 Junction Box

Functions	Connects Vibrometer controller and Data Management System and provides piezo driver for scanner and amplifier for excitation signals
Input signals	Variable gain 0.1 V ... ±31.6 V analog inputs for vibrometer and reference signal, TTL inputs for trigger and gate
Piezo controller	2 channel
Power Amplifier	Built-in amplifier, differential output, 10 V / 50 mA peak amplitude

OFV-551 / OFV 552 Vibrometer Optics Specifications

Laser wavelength	633 nm, visible red laser beam
Laser protection class	Class 2 He-Ne laser, < 1 mW, eye-safe
Available fiber lengths	1000 mm (OFV-551), 2000 mm, 3000 mm (OFV-552)
Light Intensity control	Optional laser power dimmer
Coherence Properties
Sensor head	Maxima of Visibility
OFV-551	135 mm1 + n · 204 mm; n = 0; 1; 2; ...
OFV-5522	0 mm + n · 204 mm
OFV-5523	63 mm + n · 204 mm

¹ also 33 mm on request  ² differential measurement  ³ single point measurement

Data Management System

Computer	Industrial PC with 3 GHz CPU (or higher)
RAM	1 Gbyte
Hard drive	120 GB
Data backup and storage	Combined DVD (4x) and CD (16x) recorder,
Live video board	High end graphics board with VIVO
Piezo control board	16 bit DAC
ADC and Generator boards	See separate section below
Data link	Ethernet LAN
Operating system	Microsoft Windows® 2000 (XP on request)

Data Acquisition

Software Specifications - Acquisition

Video display	Live, full‑field, black & white video image of test object directly incorporated into user interface for interactive scan set‑up and beam positioning. Digital zoom into live video image
Laser positioning	Visible laser moves with cursor on live video image by clicking or dragging the mouse
Defining scan geometry	Utilizing APS Professional mode for up to 512 x 512 points per object, of any shape. Measurement points are defined graphically over the live video image using a mouse. User can draw individual objects using polar, cartesian or hexagonal grids, or define single points. Any object may be moved or stretched while grouped or ungrouped with other objects
Vibrometer control	All vibrometer parameters such as velocity range and tracking filter are software controlled via RS232 interface
Scan unit control	Laser beam position in the microscope is fully remote controlled via the mouse
Display	Simultaneous display of live video showing actual laser spot, entire scan area including scan points, and multiple analyzer displays of various signals (time traces and spectra)
Acquired scan data	Entire spectrum acquired for all channels at all scan points
FastScan	Fast acquisition mode (up to 50 pts/s) for measurements at a single frequency. Bandwidth is definable
Gate input	Gate-input for intermittent scan control
Scan data validity check	Data quality check at all scanned points. In Signal Enhancement (SE) mode MSV-400 checks the quality of data in each spectrum. The averaged spectrum is weighted toward those spectra with the best signal to noise ratio. Measured points are labeled: optimal (SE only), valid, or A/D overload
Trigger	Auto or manual threshold, rising or falling edge, source: external or any measurement signal
Averaging	Complex or magnitude averaging of spectra, Peak Hold, Time Averaging
Overlap FFT	Up to 75 % for reduced averaging time
FFT lines	6,400 standard, 12,800 optional, Zoom FFT optional
Window functions	Rectangular, Hamming, Hanning, Flat top, Blackman Harris, Bartlett, Exponential

Software Specifications - Data Processing and Analysis

Display	Color/gray, filled/unfilled contours and 3D‑relief maps over stored CCD video image (static or animated), averaged spectra over all scan points, individual spectra at each point as Bode‑ or Nyquist‑plots, line profiles. Animation of video image for easy visualization of results. Data are scaled in velocity, acceleration or displacement. Logarithmic/linear axes
Data transfer	ASCII , Universal File Format, ME’Scope (Vibrant)
Graphics transfer	More than 20 different graphic formats (AVI, JPEG, BMP, TIFF....)
Data Processing	Complex spectral analysis provides the following quantities and functions for area and/or single-point data: magnitude, magnitude dB(A), phase, real, imaginary, frequency response function (FRF), H1, H2, auto‑power, cross‑power, coherence, averaged RMS over frequency. 3rd octave analysis
Polytec Signal Processor	Integrated Tool for Signal Processing in Presentation Mode with Excel-like Usability
Automated Processing	Software can be fully automated via Visual Basic Scripting